Ellipsometric and AES investigation of thin polycrystalline In/Cu and In/Ag couples

Structural analysis of In/Ag, In/Cu and In/Pd thin films on tungsten by ellipsometric, XRD and AES methods

“…As can be seen in Fig. 5, the optical constants of thin layers composed of silver-indium compounds are evidently different compared to the optical functions of pure In and Ag films deposited on a glass plate [29]. Optical spectra of relatively thick In/Ag diffusive layers investigated in this work differ also from the spectra of very thin InAg composite films on Ag underlayers reported in Refs.…”

“…Optical spectra of relatively thick In/Ag diffusive layers investigated in this work differ also from the spectra of very thin InAg composite films on Ag underlayers reported in Refs. [29,30]. An example of the optical function derived for sample composed of a 20 nm thick In film on 100 nm thick Ag undercoat (InAg) is shown in Fig.…”

“…6 shows the imaginary parts, he 2 ðEÞi, of the dielectric functions determined for In/Cu samples and W substrate in this study, he 2 ðEÞi spectrum of the In/Cu sample presented in Ref. [29] and he 2 ðEÞi spectrum of Cu calculated from data of Ref. [31].…”

IR‐VIS‐UV ellipsometry, XRD and AES investigation of In/Cu and In/Pd thin films

“…The AES measurements indicate that the interfacial diffusion between In and Pd films in the Pd/In/Pd samples causes larger intermixing of the elements and creates thicker diffusive InPd layers with almost monotonous variation of indium and palladium concentration. Phase composition of the layers corresponding to the light penetration depth strongly affects the optical response of the In/Cu and In/Pd samples [15,16]. In order to extract the physical properties from ellipsometric data an optical model of the sample has to be assumed.…”

“…This process changes the composition, microstructure and physical properties of the joint during the device operation. In previous papers [15,16] we presented a preliminary investigation of In/Cu and In/Pd films in terms of the effective optical properties of the composite layers formed due to the interdiffusion of elements. In this work we perform a further characterisation of InCu and InPd diffusive layers with respect to their composition, structure and morphology.…”