We have performed microstructural characterization using transmission electron microscopy (TEM) techniques to reveal nanometric features in the sub-surface region of tungsten samples exposed to high flux, low energy deuterium plasma. TEM examination revealed formation of a dense dislocation network and dislocation tangles, overall resulting in a strong increase in the dislocation density by at least one order of magnitude as compared to the initial one. Plasmainduced dislocation microstructure vanishes beyond a depth of about 10 μm from the top of the exposed surface where the dislocation density and its morphology becomes comparable to the reference microstructure. Interstitial edge dislocation loops with Burgers vector a 0 /2〈111〉 and a 0 〈100〉 were regularly observed within 6 μm of the sub-surface region of the exposed samples, but absent in the reference material. The presence of these loops points to a co-existence of nanometric D bubbles, growing by loop punching mechanism, and sub-micron deuterium flakes, resulting in the formation of surface blisters, also observed here by scanning electron microscopy.S Online supplementary data available from stacks.iop.org/PSTOP/T167/014030/mmedia