2020
DOI: 10.1364/prj.404334
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Emerging micro-additive manufacturing technologies enabled by novel optical methods

Abstract: This paper presents a comprehensive review of recent advances in micro-additive manufacturing enabled by novel optical methods with an emphasis on photopolymerization-based printing processes. Additive manufacturing, also known as three-dimensional (3D) printing, has become an important engineering solution to construct customized components or functional devices at low cost. As a green manufacturing technology, 3D printing has the advantages of high energy efficiency, low material consumption, and high precis… Show more

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Cited by 22 publications
(10 citation statements)
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“…The manufacturing accuracy of metal powder laser AM is in the range of approximately 80-250 µm, which is lower than that of stereolithography [6][7][8]. Therefore, improving the printing accuracy is a crucial research area.…”
Section: Introductionmentioning
confidence: 99%
“…The manufacturing accuracy of metal powder laser AM is in the range of approximately 80-250 µm, which is lower than that of stereolithography [6][7][8]. Therefore, improving the printing accuracy is a crucial research area.…”
Section: Introductionmentioning
confidence: 99%
“…In DLW, a tightly focused laser spot is translated through a photoresin to form a solid inside the TPP process's reactive volume, which results in a sub-micron voxel 4 . In photonics, the DLW-TPP technique has been used to fabricate free-form and transformational components [5][6][7] , point-to-point photonic wire-bondings 8 , waveguides 9 , spatial-filters 10 , gradedindex lenses 11 and photonic components 12,13 . Simultaneously, this technique is advantageous for integrated photonic circuits 14,15 due to its ability to locally and dynamically modify optical properties on feature sizes below the Abbe resolution limit.…”
Section: Introductionmentioning
confidence: 99%
“…Methods for generating arbitrary 3D structures are commonly referred to as "3D printing". Also in this area, the minimum feature sizes that can be defined are continuously shrinking as new approaches are invented and developed, although the 3D resolution is still larger than what can be achieved in planar structures [9][10][11][12][13][14]. Currently, optical methods can be pushed to a resolution of about 100nm [12].…”
Section: Introductionmentioning
confidence: 99%
“…Also in this area, the minimum feature sizes that can be defined are continuously shrinking as new approaches are invented and developed, although the 3D resolution is still larger than what can be achieved in planar structures [9][10][11][12][13][14]. Currently, optical methods can be pushed to a resolution of about 100nm [12]. Electron-or ion-beam induced deposition can reach a resolution in the nanometer-range for planar structures on thin membranes [15], but generally the resolution is limited by the interaction volume rather than the beam diameter, which also depends on the target geometry, and for 3D structures is typically in the range of tens of nanometers [11].…”
Section: Introductionmentioning
confidence: 99%