A transversely excited atmospheric pressure (TEA) CO2 laser pulse (50 mJ, 100 ns) was focused on silicon grease which is painted on a copper plate as a subtarget with a power density of 6 GW/cm2 under reduced pressure. The comparison of the characteristics of the induced laser plasma between two cases,
with subtarget and without subtarget was made. It is proved that the emission
spectrum assigned to the silicon atom can be detected only for the case with the
subtarget. It is also proved that in the absence of the subtarget, the gushing
speed of the atom is very low, while for the case with subtarget, the gushing
speed of atoms becomes very fast. It is shown that the setting of subtarget is
very effective for producing laser-induced shock wave plasma and it is very
effective for the realize quantitative analysis of a soft material.