2012
DOI: 10.1063/1.4767241
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Empirical laws of particle extraction from single-grid source of bipolar ion-electron flow

Abstract: The present research is devoted to the problem of extraction grid choice for a single-grid source of bipolar ion-electron flow. The paper contains detailed reference information on ion and electron extraction characteristics of 10 different grids with broad range of parameters: aperture width (0.09-0.6 mm), grid transparency (0.19-0.51), thickness (0.036-0.5 mm), and with different aperture geometry. The grids with square, circular, and slit apertures were made with different technologies: laser cutting, weldi… Show more

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Cited by 12 publications
(15 citation statements)
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“…22 In principle, replacing the smaller electrode by a conductive grid allows to simultaneously accelerate ions through the grid and co-extract electrons with an equal flux; however, such a configuration is found to have low efficiency and leads to plasma contamination by metal ions. 23,24 The maximum ion energy and thus applied voltage for this system is limited by quite small values (around 200-300 eV). 24 Recently, a further concept based on a self-bias effect free of mentioned drawbacks has been proposed.…”
Section: The Rf Self-bias Acceleration Conceptmentioning
confidence: 99%
See 1 more Smart Citation
“…22 In principle, replacing the smaller electrode by a conductive grid allows to simultaneously accelerate ions through the grid and co-extract electrons with an equal flux; however, such a configuration is found to have low efficiency and leads to plasma contamination by metal ions. 23,24 The maximum ion energy and thus applied voltage for this system is limited by quite small values (around 200-300 eV). 24 Recently, a further concept based on a self-bias effect free of mentioned drawbacks has been proposed.…”
Section: The Rf Self-bias Acceleration Conceptmentioning
confidence: 99%
“…23,24 The maximum ion energy and thus applied voltage for this system is limited by quite small values (around 200-300 eV). 24 Recently, a further concept based on a self-bias effect free of mentioned drawbacks has been proposed. 8,9 In this concept, the RF-DC combined space charge sheath is located between two grids, thus the focusing plasma meniscus can be formed in front of each extraction aperture and grid is not bombarded by high-energy ions.…”
Section: The Rf Self-bias Acceleration Conceptmentioning
confidence: 99%
“…Replacing the smaller driven electrode by a grid allows the generation of coincident ion-electron flow, as shown in a single-grid system [4]. As mentioned in the introduction, single-grid systems are strongly limited by grid sputtering and low source efficiency [16].…”
Section: The Neptune Rf Acceleration Conceptmentioning
confidence: 99%
“…Figure 2 shows the expected RF plasma potential waveform with respect to the grounded second grid. A φ cr is the plasma potential corresponding to the sheath collapse, and can be estimated using the Child's law for the given aperture dimensions and ion flux from plasma [15,16].…”
Section: The Neptune Rf Acceleration Conceptmentioning
confidence: 99%
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