2018
DOI: 10.1007/s40089-018-0240-8
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Employing cold atmospheric plasma (Ar, He) on Ag thin film and their influences on surface morphology and anti-bacterial activity of silver films for water treatment

Abstract: In this work to investigate the effects of using different gases in cold atmospheric plasma (CAP) on surface treatment of silver thin films (100, 120 nm film thickness) He and Ar were employed. Ag was sputtered on glass substrate and X-ray diffraction (XRD) as well as atomic force microscopy (AFM) for structural and morphological studies before and after plasma radiation was carried out. Surface treatment of Ag thin films by CAP increased surface roughness especially with Ar plasma, this rise of surface roughn… Show more

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Cited by 18 publications
(9 citation statements)
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“…This value slightly increases compared to 0.167 nm of the pristine film (Figure d). This roughness might result from the plasma surface treatment during the capping layer deposition or from enhanced atomic movement during the high‐temperature annealing process . Figure g shows a schematic of the MoO 2 film morphology variation with increasing direct annealing temperature.…”
Section: Resultsmentioning
confidence: 99%
“…This value slightly increases compared to 0.167 nm of the pristine film (Figure d). This roughness might result from the plasma surface treatment during the capping layer deposition or from enhanced atomic movement during the high‐temperature annealing process . Figure g shows a schematic of the MoO 2 film morphology variation with increasing direct annealing temperature.…”
Section: Resultsmentioning
confidence: 99%
“…6 and 7, respectively. The surface roughness of the samples was found by calculating the root mean square (RMS) of AFM data and can be evaluated by the following formula [53]:…”
Section: Resultsmentioning
confidence: 99%
“…To avoid oxidation, carbonation or nitration of the Ag thin film surface with such molecular gases as O 2 , air and N 2 , in this work, argon (Ar) is used as the working gas. In addition, in our early work [53], Ar plasma offered an acceptable antibacterial activity for removal of E. coli due to remarkable increment in the surface roughness (RMS) of Ag thin film with thickness of 120 nm (about 9 nm) compared to He plasma. Surface modification by nonequilibrium plasmas at atmospheric pressure can be accomplished by using two different approaches, i.e., the "direct (touch mode)" and the "remote (non-touch mode)" approach [29,59].…”
Section: Details Of Plasma Processing For Perpendicular Appjmentioning
confidence: 99%
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