2019
DOI: 10.1007/s40094-019-0325-4
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Employing constant photocurrent method for the study of defects in silicon thin films

Abstract: Different optical characterization techniques have been performed on a series of microcrystalline silicon thin films deposited using very high-frequency-assisted plasma-enhanced chemical vapor deposition process. The constant photocurrent method has been employed to study the defects states in density of states spectra of hydrogenated microcrystalline silicon thin films. The photocurrent measurements demonstrate anisotropy in the optoelectronic properties of the material. We have analyzed the optical absorptio… Show more

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Cited by 3 publications
(2 citation statements)
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“…This is achieved by adjusting the power at each E ph to a value which will give the smallest readable PC signal. This procedure is similar to that described by the constant photocurrent method (CPM) (11), although we do not require the generated PC signal to remain constant.…”
Section: Power Normalizationmentioning
confidence: 99%
“…This is achieved by adjusting the power at each E ph to a value which will give the smallest readable PC signal. This procedure is similar to that described by the constant photocurrent method (CPM) (11), although we do not require the generated PC signal to remain constant.…”
Section: Power Normalizationmentioning
confidence: 99%
“…Therefore, in this paper we perform nanoindentation tests with different strain rates and depths on two samples: as-deposited and annealed, in order to study dynamic properties and size effects in probably the most popular a-Si films prepared by PECVD. [24,25] II. EXPERIMENTAL…”
Section: Introductionmentioning
confidence: 99%