Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers

Koch, Sandro G.; Völz, U.; Lange, Nicolas; Köble, Sören; Schubert, Frank; Richter, Christian; Poongodan, Prajith Kumar; Vanselow, Frank; Urbahn, Christoph

doi:10.1109/ssi52265.2021.9467023

Cited by 5 publications

(2 citation statements)

References 19 publications

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“…The devices are designed to act as a new kind of gas counter that reports not only the volume flow but also the hydrogen content, including a temperature correction (for which a corresponding sensor is included). The first prototype relies on a CMUT (Capacitive Micromachined Ultrasonic Transducer) that operates at a frequency of 1.6 MHz [7]. Given the high attenuation losses at this operation frequency, the travelling range of the waves is kept at 11 mm.…”

Section: Methodsmentioning

confidence: 99%

A5.4 - Rapid Characterisation of Mixtures of Hydrogen and Natural Gas by Means of Ultrasonic Time-Delay Estimation

Monsalve,

Amelung,

Betz

et al. 2023

Lectures

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In this work we present a possible application of ultrasonic time-delay estimation to characterise mixtures of natural gas and hydrogen by the speed of sound. We constructed two prototypes based on two variants of micromachined ultrasonic transducers, both out-of-plane (CMUT) and in-plane (L-CMUT), operating at different frequencies (1.6 MHz and 40 kHz respectively). A calibration of these devices under controlled conditions will enable their assessment as potential hydrogen-sensitive gas counters.

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Section: Methodsmentioning

confidence: 99%

A5.4 - Rapid Characterisation of Mixtures of Hydrogen and Natural Gas by Means of Ultrasonic Time-Delay Estimation

Monsalve,

Amelung,

Betz

et al. 2023

Lectures

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show abstract

“…In addition, the assembly is mounted in a position system (not shown) that enables the assembly to move relative to a microphone. The sound source is an in-house designed and fabricated capacitive micro-machined ultrasound transducer [49], which is mounted on TO-18 (transistor-style metal case, see Fig. 2d, brassy) and clamped into the frame (see Fig.…”

Section: Methodsmentioning

confidence: 99%

Microacoustic metagratings at ultra-high frequencies fabricated by two-photon lithography

Melnikov,

Köble,

Schweiger

et al. 2022

Preprint

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The recently proposed bianisotropic acoustic metagratings offer promising opportunities for passive acoustic wavefront manipulation, which is of particular interest in flat acoustic lenses and ultrasound imaging at ultra-high frequency ultrasound. Despite this fact, acoustic metagratings have never been scaled to MHz frequencies that are common in ultrasound imaging. One of the greatest challenges is the production of complex structures of microscopic size. Owing to twophoton polymerization, a novel fabrication technique from the view of acoustic metamaterials, it is now possible to precisely manufacture sub-wavelength structures in this frequency range. However, shrinking in size poses another challenge; the increasing thermoviscous effects lead to considerable losses, which must be taken into account in the design. In this work we propose three microacoustic metagrating designs refracting a normally incident wave towards −35 • at 2 MHz. In order to develop metaatoms insensitive to thermoviscous effects we use shape optimization techniques incorporating the linearized Navier-Stokes equations discretized with finite element method. We report for the first time microscopic acoustic metamaterials manufactured using two-photon polymerization and, subsequently, experimentally verify their effectively using a capacitive micromachined ultrasonic transducer as source and an optical microphone as a detector in a range from 1.8 MHz to 2.2 MHz. We demonstrate not just that a microacoustic metagrating can effectively redirect the normally incident wave despite the thermoviscous losses, but also that it being only 0.29λ thick can allocate 90 % of the transmitted energy in the −1st diffraction order.

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Scaling of Air-Coupled Metagratings for Beam Steering

Köble,

Dörsam,

Haugwitz

et al. 2023

2023 IEEE International Ultrasonics Symposium (IUS)

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Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers

Cited by 5 publications

References 19 publications

A5.4 - Rapid Characterisation of Mixtures of Hydrogen and Natural Gas by Means of Ultrasonic Time-Delay Estimation

A5.4 - Rapid Characterisation of Mixtures of Hydrogen and Natural Gas by Means of Ultrasonic Time-Delay Estimation

Microacoustic metagratings at ultra-high frequencies fabricated by two-photon lithography

Scaling of Air-Coupled Metagratings for Beam Steering

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