2022
DOI: 10.1017/s1431927622000769
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Enabling In Situ Studies of Metal-Organic Chemical Vapor Deposition in a Transmission Electron Microscope

Abstract: The world of environmental microscopy provides the possibility to study and analyze transformations and reactions during realistic conditions to understand the processes better. We report on the design and development of a metal-organic chemical vapor deposition (MOCVD) system integrated with an environmental transmission electron microscope intended for real-time investigations of crystal growth. We demonstrate methods for achieving a wide range of precisely controlled concentrations of precursor gas at the s… Show more

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Cited by 18 publications
(17 citation statements)
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“…The investigated nanowires were grown at growth conditions facilitating wurtzite crystal phase as seen in video S2. More detailed description about the experimental system can be found in refs 25,26 . To analyze the step-flow and incubation processes in the GaAs nanowires videos of nanowire growth were obtained using a Gatan OneView IS camera.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…The investigated nanowires were grown at growth conditions facilitating wurtzite crystal phase as seen in video S2. More detailed description about the experimental system can be found in refs 25,26 . To analyze the step-flow and incubation processes in the GaAs nanowires videos of nanowire growth were obtained using a Gatan OneView IS camera.…”
mentioning
confidence: 99%
“…More detailed description about the experimental system can be found in ref. 25 and 26. To analyze the step-flow and incubation processes in the GaAs nanowires videos of nanowire growth were obtained using a Gatan OneView IS camera.…”
mentioning
confidence: 99%
“…The background pressure next to the sample was ∼9.20 × 10 –4 Pa. Detailed information about the used environmental TEM and its capabilities are available elsewhere …”
Section: Methodsmentioning
confidence: 99%
“…The process parameters used for the GaP nucleation and growth by Ag-Cu 3 P seed particles are summarized in Tables S4 and S5. The total and partial pressures were estimated based on a recently published study . The graph in Figure S4 reveals the variation of process conditions over time and specific experiment events.…”
Section: Methodsmentioning
confidence: 99%
“…For compositional analysis an Oxford Instruments SDD X-Max N 80T XEDS system was used. Further details about the system are provided elsewhere. , …”
Section: Experimental Sectionmentioning
confidence: 99%