2024 8th IEEE Electron Devices Technology &Amp;amp; Manufacturing Conference (EDTM) 2024
DOI: 10.1109/edtm58488.2024.10511671
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Enabling process control though predictive design and virtual metrology for high product mix manufacturing

Hyung Joo Lee,
Sanghyun Choi,
Sudheesh Krishnankutty
et al.
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