ENCOTION - A new simulation tool for energetic contamination analysis

Häublein, V.; Frey, L.; Ryssel, H.

doi:10.1109/iit.2002.1257977

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“…This contamination may affect indium implantations in the presence of fluorine, as the molybdenum-fluorine complex has almost the same mass as indium. Boron implantations too may result in molybdenum contamination by mass interference because of the formation of multiply ionized molybdenum ions and complexes (4,5).…”

Section: Introductionmentioning

confidence: 99%

Molybdenum Contamination in Indium and Boron Implantation Processes

Codegoni¹,

Polignano²,

Soncini³

et al. 2007

ECS Trans.

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Some examples of contamination by mass interference are studied in this work, specifically the molybdenum contamination in indium and boron implantations. This contamination is detected by Elymat and DLTS analyses, whereas it is missed by SPV, which is commonly used for routine line monitoring. Both Elymat and DLTS analyses consistently show molybdenum contamination clearly related to indium implantation conditions and to high dose boron implantations.

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Section: Introductionmentioning

confidence: 99%