Energy and Angular Distributions of Sputtered Species

Gnaser, Hubert

doi:10.1007/978-3-540-44502-9_5

Cited by 46 publications

(25 citation statements)

References 636 publications

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“…Sputtered atoms have typically several eV of kinetic energy when leaving the target. Following the SigmundThompson theory [40][41], the energy distribution function can be approximated by [42]    …”

Section: Gas Rarefaction and Sputter Windmentioning

confidence: 99%

Discharge physics of high power impulse magnetron sputtering

Anders

2011

Surface and Coatings Technology

246

134

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High power impulse magnetron sputtering (HIPIMS) is pulsed sputtering where the peak power exceeds the time-averaged power by typically two orders of magnitude. The peak power density, averaged over the target area, can reach or exceed 10 7 W/m 2 , leading to plasma conditions that make ionization of the sputtered atoms very likely. A brief review of HIPIMS operation is given in a tutorial manner, illustrated by some original data related to the selfsputtering of niobium in argon and krypton. Emphasis is put on the current-voltage-time relationships near the threshold of self-sputtering runaway. The great variety of current pulse shapes delivers clues on the very strong gas rarefaction, self-sputtering runaway conditions, and the stopping of runaway due to the evolution of atom ionization and ion return probabilities as the gas plasma is replaced by metal plasma. The discussions are completed by considering instabilities and the special case of "gasless" self-sputtering. IntroductionDerived from a Plenary Talk at the 2010 Plasma Engineering Conference, this work is limited to a brief recap of sputtering basics followed by considerations of how the magnetron operates under high power pulsed conditions. The emphasis will be on the ionization of sputtered atoms followed by self-sputtering, which may or may not amplify to result in selfsputtering "runaway". The runaway phenomenon will be illustrated by new data related to its onset and the establishment of sustained, steady-state self-sputtering. For simplicity and transparency, and given the finite space, the considerations are mostly phenomenological and limited to non-reactive sputtering using pure argon or krypton.High power impulse magnetron sputtering (HIPIMS) is a relatively young physical vapor deposition (PVD) technology that combines magnetron sputtering with pulsed power technology [1][2][3]. The objective is to achieve ionization of the sputtered atoms in order to have ions available for substrate etching (pre-treatment) [4] and/or for assistance to the film growth process, leading to well-adherent coatings of desirable microstructure and properties [5].In contrast to conventional mid-frequency pulsed sputtering, the power densities during pulse on-time are much higher in HIPIMS. To clearly define the scope, two definitions of HIPIMS are offered here. First, a technical definition could be "HIPIMS is pulsed sputtering where the peak power exceeds the time-averaged power by typically two orders of magnitude." This definition implies that long pauses exist between pulses of very high amplitude, hence the word "impulse" is justified in the terminology. The peak power density, averaged over the target area, often exceeds 10

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Section: Gas Rarefaction and Sputter Windmentioning

confidence: 99%

Discharge physics of high power impulse magnetron sputtering

Anders

2011

Surface and Coatings Technology

246

134

View full text Add to dashboard Cite

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“…TD and PSD are more effective for volatiles (like H, He, Na, K, S, Ar) and have typical energy below 1 eV (dashed lines in Figure 3, left and middle refer to 2 eV Na, that is, the escape energy at Mercury), while IS and MIV are effective also for refractory species (e.g., Mg, Al, Si, and Ca), thus producing more energetic ejecta closer to stoichiometric composition. In contrast to the MIV-released particles having a Maxwellian distribution of an expected peak corresponds to ∼2500-5000 K [Eichhorn, 1978] or a peak particle energy of ∼0.6 eV, the high-energy tail of IS ejecta, SHEA, on the other hand, can in principal have surface release energies above 10 eV [Gnaser, 2007;Wiens et al, 1997], more than sufficient to escape the local gravity (e.g., 0.09 eV/nucleon for Mercury, 0.03 eV/nucleon for Moon). This means that releases from all other processes can be excluded, when analyzing IS products through SHEA detection (Figures 3, right and 2).…”

Section: Shea Detection For Observing Space Weathering 321 Energetmentioning

confidence: 97%

“…For a regolith material (independently of composition or porosity), the ejected particles are mostly neutral atoms [Hofer, 1991]. For ejected atoms or molecules of species n with partial sputtering yield Y n , the normalized distribution of ejecta (f S,n ) from a refractory material, as a function of ejecta energy E e , can peak at few eV [Gnaser, 2007;Hofer, 1991] and can often be empirically reproduced by the following function [Sigmund, 1969;Sieveka and Johnson, 1984]:…”

Section: Production Of Sheamentioning

confidence: 99%

“…Gnaser [2007] showed that the effective binding energy E b,n is typically lower than the bulk cohesive energy. For refractory materials, the difference between the two can be as much as 50%, but more typically ∼10-20%.…”

Section: Production Of Sheamentioning

confidence: 99%

“…[12] The angular distribution of the ejected atoms depends on the incident ion mass so that a general expression is not easily defined; detailed discussions can be found in work by Hofer [1991] and Gnaser [2007]. For heavy incident ions, the ion impact direction does not have a large effect on the distribution in ejection angle a n , which is often approximated cos k (a n ), where k is usually between 1, as in equation (2), and 2.…”

Section: Production Of Sheamentioning

confidence: 99%

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Observing planets and small bodies in sputtered high-energy atom fluxes

et al. 2011

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[1] The evolution of the surfaces of bodies unprotected by either strong magnetic fields or thick atmospheres in the solar system is caused by various processes, induced by photons, energetic ions, and micrometeoroids. Among these processes, the continuous bombardment of the solar wind or energetic magnetospheric ions onto the bodies may significantly affect their surfaces, with implications for their evolution. Ion precipitation produces neutral atom releases into the exosphere through ion sputtering, with velocity distribution extending well above the particle escape limits. We refer to this component of the surface ejecta as sputtered high-energy atoms (SHEA). The use of ion sputtering emission for studying the interaction of exposed bodies (EB) with ion environments is described here. Remote sensing in SHEA in the vicinity of EB can provide mapping of the bodies exposed to ion sputtering action with temporal and mass resolution. This paper speculates on the possibility of performing remote sensing of exposed bodies using SHEA and suggests the need for quantitative results from laboratory simulations and molecular physic modeling in order to understand SHEA data from planetary missions. In Appendix A, referenced computer simulations using existing sputtering data are reviewed.

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CsPbIBr₂‐Based Bifacial Semitransparent Solar Cells for All‐Day Applications

Zhao,

Ge,

Zheng

et al. 2023

Energy Tech

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Among all‐inorganic perovskites, CsPbIBr2 has become a potential candidate in semitransparent perovskite solar cells (ST‐PSCs) due to its excellent thermal stability and suitable bandgap. Herein, by optimizing the ambient temperature in an N2‐filled glovebox, the growth process of CsPbIBr2 crystals is regulated to avoid the generation of pinholes and improve the photoelectric conversion capacity of perovskite cells. When the ambient temperature is around 25 °C, the champion power conversion efficiency (PCE) of 10.82% with opaque n–i–p structure is achieved. Based on MoOx/Ag/MoOx (20/12/20 nm) multilayer top electrode, the ST‐PSC device achieves a maximum PCE of 7.06% at the fluorine‐doped tin oxide side under the simulated 1 sun illumination condition and a PCE of 23.96% at MoOx/Ag/MoOx electrode side under the intensity of 1000 lux (≈350 μW cm−2) provided by a white light‐emitting diode lamp, along with an average visible transmittance of 29.25%. The resulting perovskite solar cell is the first bifacial inorganic ST‐PSC that could be used under both sunlight and indoor light, which is an important step toward all‐day power generation of inorganic ST‐PSCs and building‐integrated photovoltaics.

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Energy and Angular Distributions of Sputtered Species

Cited by 46 publications

References 636 publications

Discharge physics of high power impulse magnetron sputtering

Discharge physics of high power impulse magnetron sputtering

Observing planets and small bodies in sputtered high-energy atom fluxes

CsPbIBr₂‐Based Bifacial Semitransparent Solar Cells for All‐Day Applications

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Energy and Angular Distributions of Sputtered Species

Cited by 46 publications

References 636 publications

Discharge physics of high power impulse magnetron sputtering

Discharge physics of high power impulse magnetron sputtering

Observing planets and small bodies in sputtered high-energy atom fluxes

CsPbIBr2‐Based Bifacial Semitransparent Solar Cells for All‐Day Applications

Contact Info

Product

Resources

About

CsPbIBr₂‐Based Bifacial Semitransparent Solar Cells for All‐Day Applications