Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Poirier, Lucas; Lassise, Adam; Mostafa, Yahia; Behnke, Lars; Braaksma, N.; Assink, Luc; Hoekstra, Ronnie; Versolato, Oscar

doi:10.1007/s00340-022-07844-5

Cited by 9 publications

(14 citation statements)

References 24 publications

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“…We later obtained from detailed simulations [115], that the transmission of the four-grid stack intricately depends on the co-alignment of the grids, the energy of the ions, and the electrostatic bias on each grid. From our simulations, stack transmission was found to range between 41% (in case of maximally misaligned grids, consistent with our previous results [87,114]) and 82% (in case of geometrically overlapping grids with maximum alignment). In the following, we therefore take a representative and average transmission of 60% for all RFAs, with a systematic error of 20% covering the range of possible extreme cases of grid alignment.…”

Section: Methodssupporting

confidence: 91%

“…When the output impedance of our oscilloscope is matched with that of the amplifier (50 Ω), the amplifier gain becomes 25 kV/A. Further information can be found in Poirier et al [114]. The detectors feature four grids, namely a reference grounding grid G, two retarding grids R 1 and R 2 , and a suppressing grid S (see Figure 3.1(b)).…”

Section: Methodsmentioning

confidence: 97%

“…Ion kinetic energies are calculated using the time of flight and the length of flight 𝑑 of ions, assuming ballistic motion. The time-of-flight ion current is converted to a time-dependent voltage thanks overlaps with a charge-integrated spectrum (gray line; "FC-like" [114]) taken at the same position as the RFA spectrum.…”

Section: Methodsmentioning

confidence: 99%

“…The post-processing scheme was explained in detail in Ref. [114], an earlier study in a very similar context.…”

Section: Methodsmentioning

confidence: 99%

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Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Hemminga

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State-of-the-art nanolithography machines employ extreme ultraviolet (EUV) light to pattern nanometer-scale features on silicon wafers for the production of integrated circuits. This radiation is generated in a laser-produced plasma formed on tin microdroplet targets. This thesis presents work on radiation-hydrodynamic simulations of tin droplet-based laser-produced plasmas, including plasma characterization, plasma expansion, and subsequent early-time droplet dynamics. The work is closely connected to experimental measurements, be it to successfully validate the simulation results on plasma expansion and droplet dynamics, or to guide future experiments towards optimal EUV emission conditions. It is shown that, after validation, the simulations can provide additional insight into (i) non-trivial plasma dynamics leading to the measured ion kinetic energy distributions and (ii) the plasma impulse shaping the early-time droplet dynamics that ultimately determines the late-time droplet morphology. Moreover, the simulations can successfully explore a broad range of laser wavelengths and intensities. Finally, these investigations aim to complement efforts to increase the performance of the EUV source system: the conversion efficiency of laser pulses to in-band EUV radiation as well as the lifetime of the collector mirror, which may be affected by ionic or liquid debris.

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Section: Methodssupporting

confidence: 91%

Section: Methodsmentioning

confidence: 97%

Section: Methodsmentioning

confidence: 99%

“…The post-processing scheme was explained in detail in Ref. [114], an earlier study in a very similar context.…”

Section: Methodsmentioning

confidence: 99%

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Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Hemminga

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“…The RFA is absolutely calibrated against an open, grid-less Faraday cup [18] to establish the integral transmission of the four grids. The same 'bottom-up' method as introduced by Poirier et al [19] is used to extract the kinetic-energy distributions for each individual charge state of tin ions from their joint overlapping energy distributions.…”

Section: Experiment: Methodology and Datamentioning

confidence: 99%

Evidence of production of keV Sn⁺ ions in the H₂ buffer gas surrounding an Sn-plasma EUV source

Rai

Bijlsma

Poirier

et al. 2023

Plasma Sources Sci. Technol.

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Charge-state-resolved kinetic energy spectra of Sn ions ejected from a laser-produced plasma (LPP) of Sn have been measured at different densities of the H2 buffer gas surrounding a micro-droplet LPP. In the absence of H2, energetic keV Sn ions with charge states ranging from 4+ to 8+ are measured. For the H2 densities used in the experiments no appreciable stopping or energy loss of the ions is observed. However, electron capture by Sn ions from H2 results in a rapid shift towards lower charge states. At the highest H2 pressure of 6×10−4 mbar, only Sn2+ and Sn+ ions are measured. The occurrence of Sn+ ions is remarkable due to the endothermic nature of electron capture by Sn2+ ions from H2. To explain the production of keV Sn+ ions, it is proposed that their generation is due to electron capture by metastable Sn2+∗ ions. The gateway role of metastable Sn2+∗ is underpinned by model simulations using atomic collision cross sections to track the charge states of Sn ions while traversing the H2 buffer gas.

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Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics

Mathijssen,

Mazzotta,

Heinzerling

et al. 2023

Appl. Phys. B

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We present a new experimental setup for high-order harmonic generation in laser-produced plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation of the laser-produced plasmas by studying the emitted harmonics. We have successfully generated high-order harmonics in laser-produced Al, Ni, Ag, In, and Sn plasmas. Large differences in harmonic spectra and signal yields have been observed for these different targets. Harmonics up to order 25, corresponding to a wavelength of 62.4 nm and photon energy of 19.9 eV, have been measured with tin plasmas. Scanning laser parameters and delay between pump and fundamental laser pulses allows us to optimise the harmonic yield and observe the temporal dynamics of the laser-produced tin plasma.

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Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Cited by 9 publications

References 24 publications

Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Evidence of production of keV Sn⁺ ions in the H₂ buffer gas surrounding an Sn-plasma EUV source

Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics

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Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Cited by 9 publications

References 24 publications

Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Single-fluid radiation-hydrodynamic modeling of laser-driven EUV-emitting plasmas

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics

Contact Info

Product

Resources

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Evidence of production of keV Sn⁺ ions in the H₂ buffer gas surrounding an Sn-plasma EUV source