Energy Balance and Heating of the Substrate at the Deposition of Coatings Using High-Power Pulsed Ion Beams

Abstract

The energy balance on the substrate during the deposition of coatings using high-power pulsed ion beams of sub-microsecond duration is analyzed. A numerical model of thermal processes in the substrate is developed. With it, data on heating of a solid as a result of the deposition of the metal coating on its surface were obtained. It was revealed that even if the power density of the beam at the level of 109 W/cm2, the maximum temperature of the substrate does not exceed a few tens of degrees.