1973
DOI: 10.1063/1.1662883
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Energy balance in low-pressure gas discharges

Abstract: In the positive column of low-pressure gas discharges, the electron energy distribution can be markedly non-Maxwellian, in particular in the tail of the distribution at low degrees of ionization. A method is described which enables one to account for large deviations from a Maxwellian distribution when calculating collision rates, energy flow terms, excited-state densities, and the radiation output. Illustrative examples are given for Cs–Ar, Ar, and Hg–Ar discharges. Possible extensions and applications of the… Show more

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Cited by 104 publications
(35 citation statements)
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“…In accordance with Ref. [21], a three-level model consisting of a ground state, an excited state with E, = 11.60 eV (representing the first four excited states Pz, Pi, Pi, and Pi with threshold energies 11.55, 11.62, 11.74, and 11.83 eV, respectively), and an ion ground state with e2 = 15.76 eV. The total cross section data as a function energy has been obtained from standard sour-ces [ 22,231.…”
Section: The Collision Term and Transport Coefficientsmentioning
confidence: 54%
See 1 more Smart Citation
“…In accordance with Ref. [21], a three-level model consisting of a ground state, an excited state with E, = 11.60 eV (representing the first four excited states Pz, Pi, Pi, and Pi with threshold energies 11.55, 11.62, 11.74, and 11.83 eV, respectively), and an ion ground state with e2 = 15.76 eV. The total cross section data as a function energy has been obtained from standard sour-ces [ 22,231.…”
Section: The Collision Term and Transport Coefficientsmentioning
confidence: 54%
“…Future work by the authors involving rf glow discharge modeling will include a thorough comparison of this model with a quasistatic "drift-diffusion" model [S] to investigate nonequilibrium electron effects and the development of experiments to further examine the model's validity. Moreover, the potential for utilizing a multi-group electron model [21] to include electronelectron and superelastic collisions will be investigated.…”
Section: Discussionmentioning
confidence: 99%
“… is the spectral irradiance of the radiation field at frequency  appropriate to the 2  1 transition, B 21 represents Milne coefficient, and 21 ) represents the irradiative recombination rate coefficient to level n [19].  is the two photon, resonance state ionization rate coefficient and F represents the photon flux density.…”
Section: Rate Equationsmentioning
confidence: 99%
“…The model includes radiative transitions and the possibility of a deviation from the Maxwellian electron energy distribution. The two electron group model is used to describe the electron distribution (3,4). The different contributions of the electrons belonging to the two groups to the non-elastic collisions are then considered.…”
Section: Introductionmentioning
confidence: 99%