Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Choi, Wonjae; Jeon, Youngbae; Jeong, Jaehwa; Sood, R.; Kim, S. G.

doi:10.1007/s10832-006-6287-3

Cited by 286 publications

(163 citation statements)

References 7 publications

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“…In vibration-based energy harvesters, there has been a substantial research and development and to extract the bridge's excitations, vibration-based piezoelectric [43], electromagnetic [44][45][46], and electrostatic [47,48] energy harvesters can be utilized. Vibration-based piezoelectric energy harvester usually consists of a piezoelectric membrane or beam.…”

Section: Introductionmentioning

confidence: 99%

Electromagnetic Bridge Energy Harvester Utilizing Bridge’s Vibrations and Ambient Wind for Wireless Sensor Node Application

Khan

Iqbal

2018

Journal of Sensors

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This paper presents novel electromagnetic bridge energy harvesters (BEHs) utilizing bridge vibrations and ambient wind surges to power wireless sensor nodes used for bridges' health monitoring. The developed BEHs are cantilever-type and are comprised of a wound coil, permanent magnet, an airfoil, cantilever beam, and a support. Harvesters are characterized in-lab under different vibration levels and are subjected to variable speed air surges. The harvesters exhibit multiresonant frequencies; prototype I has resonant frequencies of 3.6, 14.9, and 17.6 Hz. However, 7.6, 33, and 45 Hz are the resonant frequencies for prototype II. Under vibration testing, prototype I produced a maximum voltage of 206 mV and an optimum power of 354.51 μW at a frequency of 3.6 Hz and 0.4g acceleration. However, at a frequency of 7.6 Hz and 0.6g acceleration, prototype II showed the capability of generating a maximum voltage of 430 mV and an optimum power of 2214.32 μW. Moreover, when BEHs are characterized under variable speed air surges, prototype I generated a load voltage of 19 mV and a power of 7.84 μW at an air speed of 9 m/s; however, 22 mV and 9.14 μW load voltage and power, respectively, are developed by prototype II at 6 m/s air speed.

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Section: Introductionmentioning

confidence: 99%

Electromagnetic Bridge Energy Harvester Utilizing Bridge’s Vibrations and Ambient Wind for Wireless Sensor Node Application

Khan

Iqbal

2018

Journal of Sensors

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“…The mechanical vibration energy can be converted to electrical energy by using electromagnetic [14][15][16], piezoelectric [17][18][19], and electrostatic [20][21][22] mechanisms. The piezoelectric transduction has some advantages such as high power density, very simple design, and very small size [23][24][25][26] in comparison with other alternatives. Moreover, unlike the electrostatic transduction, it does not require bias voltage input.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric energy harvesting from vertical piezoelectric beams in the horizontal fluid flows

Amini¹,

Emdad

Farid

2017

Scientia Iranica

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Abstract. Piezoelectric Energy Harvesting (PEH) of uid-ow energy has attracted signi cant attention throughout the last decade. In the previous PEH from uid ow, a piezoelectric beam was placed behind a blu body, such as circular cylinders. Hence, the piezoelectric beam oscillated due to the vortex shedding behind of the blu body. Subsequently, this vibration generated voltage in the beam. In many engineering vehicles such as airplanes, the strong vortex shedding caused by blu body was destructive and reduced the e ciency of devices; therefore; it was not proper to attach a blu body to these devices. In this paper, PEH from vertical beams in low speeds and high-speed ows is investigated. The current work shows that in contrast to low-speed ows, the extracted power from vertical beam in high-speed ows is considerable. Moreover, as a practical example of vertical beam in high-speed ows, the energy harvesting from piezoelectric Gurney ap attached to an NACA2412 airfoil is investigated. Finally, this study proposes a piezoelectric vertical beam with attached end cylinder as an energy harvester in the lowspeed ows. It is indicated that this device has strong vibration and, therefore, produces a remarkable electrical power.

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“…A key challenge in designing MEMS energy harvesters is to make them resonate with low frequency ambient vibrations. Spiral geometry has been suggested as a possible option for compact low frequency substrate in energy harvesting devices [2]. However the vibrational analysis of curved beam with varying radius (spirals) is missing in the literature [3].…”

Section: Introductionmentioning

confidence: 99%

Coupled out of plane vibrations of spiral beams for micro-scale applications

Karami

Yardimoglu

Inman

2010

Journal of Sound and Vibration

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a b s t r a c tAn analytical method is proposed to calculate the natural frequencies and the corresponding mode shape functions of an Archimedean spiral beam. The deflection of the beam is due to both bending and torsion, which makes the problem coupled in nature. The governing partial differential equations and the boundary conditions are derived using Hamilton's principle. Two factors make the vibrations of spirals different from oscillations of constant radius arcs. The first is the presence of terms with derivatives of the radius in the governing equations of spirals and the second is the fact that variations of radius of the beam causes the coefficients of the differential equations to be variable. It is demonstrated, using perturbation techniques that the derivative of the radius terms have negligible effect on structure's dynamics. The spiral is then approximated with many merging constant-radius curved sections joined together to approximate the slow change of radius along the spiral. The equations of motion are formulated in non-dimensional form and the effect of all the key parameters on natural frequencies is presented. Non-dimensional curves are used to summarize the results for clarity. We also solve the governing equations using Rayleigh's approximate method. The fundamental frequency results of the exact and Rayleigh's method are in close agreement. This to some extent verifies the exact solutions. The results show that the vibration of spirals is mostly torsional which complicates using the spiral beam as a host for a sensor or energy harvesting device.& 2010 Elsevier Ltd. All rights reserved. IntroductionWe are motivated to look at the vibrations of spiral shaped structures as a prelude to sensing and energy harvesting using the piezoelectric effect in micro-electro-mechanical systems (MEMS) devices. Vibrational energy harvesters convert vibrations available in the environment to electrical energy. The energy generated can be used to power sensor nodes [1]. These energy self-sufficient sensors can be placed in remote places to gather data and wirelessly transmit information. A key challenge in designing MEMS energy harvesters is to make them resonate with low frequency ambient vibrations. Spiral geometry has been suggested as a possible option for compact low frequency substrate in energy harvesting devices [2]. However the vibrational analysis of curved beam with varying radius (spirals) is missing in the literature [3]. Hu et al.[3] approximated the spiral by eccentric constant-radius arcs but only derived the governing equations and did not solve them for vibration characteristics. This paper attempts to solve the free vibrations of spiral beams and pave the way to the modeling of spiral MEMS harvesting devices.

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Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Cited by 286 publications

References 7 publications

Electromagnetic Bridge Energy Harvester Utilizing Bridge’s Vibrations and Ambient Wind for Wireless Sensor Node Application

Electromagnetic Bridge Energy Harvester Utilizing Bridge’s Vibrations and Ambient Wind for Wireless Sensor Node Application

Piezoelectric energy harvesting from vertical piezoelectric beams in the horizontal fluid flows

Coupled out of plane vibrations of spiral beams for micro-scale applications

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