Energy Harvesting using a Lead Zirconate Titanate (PZT) Thin Film on a Polymer Substrate

Dufay, Thibault; Guiffard, Benoît; Séveno, Raynald; Thomas, Jean-Christophe

doi:10.1002/ente.201700732

Cited by 12 publications

(10 citation statements)

References 7 publications

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“…3). Thus, the advantage of this process compared to [19] and [20] are the larger dimensions and the shape tunability that can be given to the generator. Finally, thin copper wires were fixed onto metal terminals by conductive paste and a poling process was performed at 100 °C onto a hot-plate under an applied DC electric field of 100 kV/cm for approximately 2 hours.…”

Section: Fabrication Processmentioning

confidence: 99%

“…This article presents a simplified manufacturing procedure based on the method developed in [20], allowing to easily adapt the cantilever-shaped micro-generator to a vibration source for an energy harvesting application. For this, the PZT is transferred to a polymer only at the last step of process and the IDE electrodes are realized on the free aluminium PZT side.…”

Section: Introductionmentioning

confidence: 99%

“…In this article, the PET is cut into a beam shape 11 cm long and 2.2 cm wide to have a resonance frequency of less than 20 Hz. These large dimensions could be achieved only thanks to the modified fabrication process in comparison with previous work[20]. In the latter case (Fig5 (a)), the final size of the piezoelectric generator was limited (2.5 cm x 2.5 cm) because the IDE realization step is carried out after PZT transfer onto the polymer substrate.…”

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confidence: 99%

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Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

Scornec

Guiffard

Séveno

et al. 2020

Sensors and Actuators A: Physical

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The conversion of vibrations into electrical energy for powering low-power small electronic components has been investigated by researchers from different disciplines in the last decade. Among the possible mechanisms, piezoelectricity has received particular attention. In the field of low frequency cantileverbased vibration energy harvesters, the proof mass is essential in order to reduce the resonance frequency and increase the stress along the beam to increase the output power. In this work, a manufacturing process of a micro generator is proposed to easily modify and increase the dimensions of the cantilever, and thus tune its resonance frequency. The effect of the position of the mass on the performances of this flexible piezoelectric energy harvester is also studied. For a proof mass at 8 cm from clamping, we obtain a resonance frequency of 9.9 Hz, a maximum power of 127 μW against a resonance frequency of 16 Hz and a maximum power of 72 μW with a mass at 4 cm. This shows that the maximum power extracted varies in for a constant acceleration of 1 g (9.81 m/s 2 ), as expected theoretically. These ≅ 1 ! promising results show that the prototype can be considered for a low power application as an energy harvesting-based micro-generator.

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Section: Fabrication Processmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

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Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

Scornec

Guiffard

Séveno

et al. 2020

Sensors and Actuators A: Physical

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“…Various non‐centrosymmetric piezoelectric materials such as lead zirconate titanate (PZT), [ 8–12 ] quartz, [ 13 ] zinc oxide (ZnO), [ 3,14–16 ] barium titanate (BaTiO 3 , BTO), [ 17–22 ] zinc sulfide (ZnS), [ 23–24 ] polyvinylidene fluoride (PVDF), [ 25,26 ] etc. are widely used for PENGs.…”

Section: Figurementioning

confidence: 99%

n‐ZnO/p‐NiO Core/Shell‐Structured Nanorods for Piezoelectric Nanogenerators

et al. 2020

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Recently, nanogenerators (NG) have attracted considerable attention due to the practical applications of converting mechanical energy to electrical energy from various sources. [1-5] Piezoelectric materials generate electricity by generating dielectric polarization when a physical force is applied. A piezoelectric nanogenerator (PENG) based on piezoelectric materials can convert various mechanical energy sources into electrical energy without generating contaminants, and they can be easily miniaturized and are light in weight, so they can be installed where vibration and pressure energy exist. [6,7] Various non-centrosymmetric piezoelectric materials such as lead zirconate titanate (PZT), [8-12] quartz, [13] zinc oxide (ZnO), [3,14-16] barium titanate (BaTiO 3 , BTO), [17-22] zinc sulfide (ZnS), [23-24] polyvinylidene fluoride (PVDF), [25,26] etc. are widely used for PENGs. Among them, wurtzite structured ZnO nanorods (NRs) have undergone numerous studies due to their unique features, such as their piezoelectricity, semiconducting property, transparency, biocompatibility, and low manufacturing cost. [3,13-16] ZnO NRs are an intrinsic n-type semiconductor due to native defects such as zinc (Zn) interstitials and oxygen (O) vacancies. Excessive free electrons from the defects in ZnO NRs limit their harvesting performance due to the screening of piezoelectric potential when mechanical stress is applied. To solve this issue, several approaches have been reported, for example, thermal annealing, [27] O 2 plasma treatment, [28,29] and p-type semiconducting layer coating [30,31] to reduce native defects or modulate carrier concentration. In a previous work, NiO was used as a p-type semiconductor in connection with doping materials research to enhance the output performance of ZnO-based PENGs. [30] The oxidation temperature of Ni for making NiO is very high, however, from 500 to 900 C, so there is a disadvantage in that its use on a

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“…Ferroelectric films have been widely applied in micro-actuators, capacitors, electro-optical devices and ferroelectric memories [1][2][3]. Perovskitestructured lead zirconate titanate (PbZr x Ti 1−x O 3 , PZT) is one of the most important members in the ferroelectric family [4][5][6][7][8][9][10]. PbZr 0.52 Ti 0.48 O 3 films in the vicinity of the so-called morphotropic phase boundary have been extensively researched due to their excellent ferroelectric, piezoelectric properties and coupling coefficients.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of single-crystalline Pb(Zr_0.52Ti_0.48)O₃ nanocrystals by hydrothermal method

Deng

Qin

et al. 2019

Materials Science-Poland

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PbZr0.52Ti0.48O3 nanocrystals were synthesized by a hydrothermal method. The effect of NaOH concentration, reaction temperature and time on nucleation and growth of PbZr0.52Ti0.48O3 nanocrystals was investigated. As the 0.05 mol/L PbZr0.52Ti0.48O3 precursors were heated at 200 °C for 21 h with NaOH concentration of 0.5 mol/L, the tetragonal PbZr0.52Ti0.48O3 nanocrystals were formed, and the grain size was more than 20 nm. With increasing the NaOH concentration from 0.5 to 1.5 mol/L, the grain size of PbZr0.52Ti0.48O3 nanocrystals decreased. When the precursors were heated at different temperatures (140 °C to 200 °C) for 21 h with 1.0 mol/L NaOH, single-phase PbZr0.52Ti0.48O3 nanocrystals were obtained at 160 °C to 200 °C. With increasing the reaction temperature from 160 °C to 200 °C, the grains size of PbZr0.52Ti0.48O3 nanocrystals increased from 5 nm to 9 nm. When the precursors were heated at 160 °C in different reaction times from 6 h to 21 h, the evolution from amorphous to crystalline PbZr0.52Ti0.48O3 nanocrystals in correlation with the reaction time was observed. Single crystalline PbZr0.52Ti0.48O3 nanocrystals with narrow size distribution (from 5 nm to 9 nm) were synthesized by controlling the NaOH concentration, reaction temperature and time. The obtained results can find potential application in preparing PbZr0.52Ti0.48O3 thin films on flexible substrates.

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Energy Harvesting using a Lead Zirconate Titanate (PZT) Thin Film on a Polymer Substrate

Cited by 12 publications

References 7 publications

Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

n‐ZnO/p‐NiO Core/Shell‐Structured Nanorods for Piezoelectric Nanogenerators

Synthesis of single-crystalline Pb(Zr_0.52Ti_0.48)O₃ nanocrystals by hydrothermal method

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Energy Harvesting using a Lead Zirconate Titanate (PZT) Thin Film on a Polymer Substrate

Cited by 12 publications

References 7 publications

Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

Frequency tunable, flexible and low cost piezoelectric micro-generator for energy harvesting

n‐ZnO/p‐NiO Core/Shell‐Structured Nanorods for Piezoelectric Nanogenerators

Synthesis of single-crystalline Pb(Zr0.52Ti0.48)O3 nanocrystals by hydrothermal method

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Product

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Synthesis of single-crystalline Pb(Zr_0.52Ti_0.48)O₃ nanocrystals by hydrothermal method