Energy Loss in a MEMS Disk Resonator Gyroscope

Abstract

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping, anchor loss, and electronic damping. In this paper, the thermoelastic damping, anchor loss, and electronic damping for our DRG design are calculated by combining finite element analysis and theoretical derivation. Thermoelastic damping is the dominant energy loss mechanism and contributes over 90% of the total dissipated energy. Benefiting from a symmetrical structure, the anchor loss is low and can be neglected. However, the electronic damping determined by the testing circuit contributes 2.6%–9.6% when the bias voltage increases from 10 V to 20 V, which has a considerable impact on the total quality factor (Q). For comparison, the gyroscope is fabricated and seal-packaged with a measured maximum Q range of 141k to 132k when the bias voltage varies. In conclusion, thermoelastic damping and electronic damping essentially determine the Q of the DRG. Thus, optimizing the resonance structure and testing the circuit to reduce energy loss is prioritized for a high-performance DRG design.

Fabrication method of quartz glass ring resonator using sacrificial support structure

“…Air damping can dominate at the atmospheric pressure [34,35]. Air damping can be avoided by hermetically sealed vacuum packaging [36]. The frequency difference (∆f ) between two modes was 681 Hz.…”

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

“…This Article experimentally studies the influence of remote boundary conditions on radiofrequency clamping loss in micromechanical flexural-mode and bulk-mode resonators. The tested microcantilevers and square plate resonators are hard clamped to the anchors with relatively short support beams [56], [68], so clamping loss is expected to play a large role in the dissipation. The oscillation frequency varies from 100 kHz to 10 MHz for these devices, as demarcated in Table I.…”

Concurrent Detection of Linear and Angular Motion using a Single-Mass 6-axis Piezoelectric IMU

“…Moreover, the symmetrical propriety of the disk structure offers a high sensitivity [17,20]. In addition, the resonant disk devotes a large area of multiple drive and sense electrodes so that it becomes easier to operate and measure signals, using this structure, compared to other inertial sensors [21].…”

“…The proposed structure uses a cylindrical proof mass as an oscillator, attached to the bottom center of an anchored piezoelectric disk. This configuration can improve performances due to the use of a great modal effective mass compared to other resonator designs [10,21]. The structure uses piezoelectric effect to drive and sense the 6-DOF (Degree of Freedom) which is an advantage compared to the tuning fork and disk resonator structures, which generally detects only angular motion components [17,19].…”