Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives

Zhao, Wenxuan; Li, Hangxin; Wang, Shengwei

doi:10.1016/j.rser.2023.113532

Cited by 10 publications

(1 citation statement)

References 61 publications

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“…With the vigorous development of global society, economy, and industrial technology, the cleanroom industry continues to progress [1,2]. A cleanroom is a controlled environment with strict requirements for temperature, humidity, pressure, noise, and cleanliness.…”

Section: Introductionmentioning

confidence: 99%

The research on the particle concentration distribution of directed airflow in cleanrooms for operators

Li,

Zhang

et al. 2024

PLoS ONE

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Existing research of non-unidirectional cleanrooms generally suggests that lower-side return air outlets provide better control effect on indoor particle concentration. As a result, there has been relatively less focus on return air outlets. However, installing return air outlets oriented towards operators as particle emission sources can reduce the impact on process layout and improve space utilization, while also provide less impact from upper particle emission sources on the workbench area. To investigate the characteristics of return air outlet for operators (abbreviated as H), this study compared the particle concentration distribution, non—uniformity, and purification efficiency of return air oultet H and the traditional lower-side (abbreviated as L) return air outlets by experiments and CFD simulations. Based on the theory of mass conservation, the expression of required air supply volume under equivalent cleanroom conditions was derived. Under corresponding experimental and simulation conditions, the particle concentration differences range from 2.0% to 12.7% for return air outlet H and from 12.4% to 33.2% for return air outlet L, and these differences gradually decrease with the air exchange rate (ACH) increases. The results show that ACH = 20 is sufficient for cleanliness requirements with return air outlet H when there is one person in the cleanroom, while a higher rate of ACH = 35 is needed when there are two persons. Although lower-side return air outlets have certain potential for reducing particle concentration in the cleanroom, increasing the air exchange rate remains the most effective method to control indoor particle concentration. Compared to the traditional lower-side return air outlet L, the ranges of the non-uniformity coefficients for return air outlet H and L are 0.50 to 0.67 and 0.45 to 0.53, respectively. The average non-uniformity coefficient differs by 11.9%, and there is not a significant difference in uniformity with more than 20 air changes per hour. The use of return air outlets H only requires an additional 11% of air supply volume to achieve the same cleanliness, demonstrating its effectiveness in controlling particle concentration. It is suitable for cleanrooms with higher requirements for workbenches and for cleanrooms with restricted floor usage or requiring flexible layouts. The study also explores the impact of width of return air outlet oriented towards operators as particle emission sources, the results show that the larger-sized outlets facilitate the particle discharge and control the particle distribution inside the room.

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Section: Introductionmentioning

confidence: 99%

The research on the particle concentration distribution of directed airflow in cleanrooms for operators

Li,

Zhang

et al. 2024

PLoS ONE

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Thermal performance of a novel Trombe wall enhanced by a solar energy focusing approach

Dong,

Xiao,

2024

Low-carbon Mater. Green Constr.

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The Trombe wall is a passive solar building exterior wall system proposed by Professor Felix Trombe in France, which can collect solar energy to heat buildings without additional energy consumption, making it a focal point of research in building energy conservation. However, its effectiveness is constrained by the low density of solar radiation in winter and the potential for overheating in summer. This study introduces a novel Trombe wall designed to address these issues through a focused strategy, enabling automatic transition between heating during winter and shading during summer. The thermal performance parameters of the novel Trombe walls in both winter and summer seasons are examined, and their energy consumption is assessed using experimental research methodologies. Findings indicate that the novel Trombe wall facilitates greater energy savings in both winter and summer. When compared with traditional Trombe walls, the novel Trombe wall achieves a significant reduction in energy consumption, with up to 55 W/m2 in heating load during winter and 47 W/m2 in cooling load during summer. The introduction of this new system holds substantial potential for the realization of zero-energy buildings.

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A numerical study on effective arrangement of fan-filter units in a semiconductor cleanroom: Control of hazardous gas leakage from a process instrument

Yao,

Lee,

Wen

et al. 2025

Building and Environment

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Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives

Cited by 10 publications

References 61 publications

The research on the particle concentration distribution of directed airflow in cleanrooms for operators

The research on the particle concentration distribution of directed airflow in cleanrooms for operators

Thermal performance of a novel Trombe wall enhanced by a solar energy focusing approach

A numerical study on effective arrangement of fan-filter units in a semiconductor cleanroom: Control of hazardous gas leakage from a process instrument

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