“…Figure a shows the main scenarios where active oxidation substances are inevitably introduced during the processing and in the servicing of MoS 2 devices, such as O 2 , H 2 O, −OH, etc. in wet transfer, patterned etching, insulating layer deposition, etc. , These active substances, especially O 2 , tend to initiate the evolution of defects. − Figure S1a shows the Gibbs free energy (Δ G ) of O 2 initiating S, V S , and V S2 in MoS 2 to produce V S , V S + V S , and V S2 + V S , respectively. The insets show the optimized geometries of O 2 initiating the evolution of different defects and the other two cases are shown in Figure S1b–c.…”