Future Medical Engineering Based on Bionanotechnology 2006
DOI: 10.1142/9781860948800_0048
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Enhanced Electron Emission Using Indium Tin Oxide/Silicon Monoxide/Gold Structure

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“…In order to experimentally confirm this In ion diffusion influence, a device was fabricated consisting of In/SiO/Au deposited under the same conditions as before, with the same layer thickness. Although ion diffusion occurred, and was confirmed by SIMS, 11) compared with the ITO/SiO/Au device, the In/ SiO/Au device did not show any emission, as the conduction current was so high that the SiO rapidly broke down during device (forming) process as will be explained in the following discussion.…”
Section: Interpretation Of Resultsmentioning
confidence: 73%
“…In order to experimentally confirm this In ion diffusion influence, a device was fabricated consisting of In/SiO/Au deposited under the same conditions as before, with the same layer thickness. Although ion diffusion occurred, and was confirmed by SIMS, 11) compared with the ITO/SiO/Au device, the In/ SiO/Au device did not show any emission, as the conduction current was so high that the SiO rapidly broke down during device (forming) process as will be explained in the following discussion.…”
Section: Interpretation Of Resultsmentioning
confidence: 73%