We have studied the electronic and magnetic states of Co and Mn atoms at the interface of the Co2Mn β Si (CMS)/MgO (β=0.69, 0.99, 1.15 and 1.29) magnetic tunnel junction (MTJ) by means of x-ray magnetic circular dichroism. In particular, the Mn composition (β) dependences of the Mn and Co magnetic moments were investigated. The experimental spin magnetic moments of Mn, mspin(Mn), derived from XMCD weakly decreased with increasing Mn composition β in going from Mn-deficient to Mn-rich CMS films. This behavior was explained by first-principles calculations based on the antisite-based site-specific formula unit (SSFU) composition model, which assumes the formation of only antisite defect, not vacancies, to accommodate off-stoichiometry. Furthermore, the experimental spin magnetic moments of Co, mspin(Co), also weakly decreased with increasing Mn composition. This behavior was consistently explained by the antisite-based SSFU model, in particular, by the decrease in the concentration of CoMn antisites detrimental to the half-metallicity of CMS with increasing β. This finding is consistent with the higher TMR ratios which have been observed for CMS/MgO/CMS MTJs with Mn-rich CMS electrodes.