Competition of nitrogen doping and graphitization effect for field electron emission from nanocrystalline diamond films J.Synthesis and electron field emission of nanocrystalline diamond thin films grown from N 2 /CH 4 microwave plasmasWe have investigated the field emission properties of diamond films grown under substrate bias conditions in a microwave plasma chemical vapor deposition system, with a substrate temperature of 800°C, microwave power of 600 W, and a total pressure of 11 Torr. One group of films was grown with a substrate bias of Ϫ100 V in gas mixtures of 1% N 2 and 1%-20% CH 4 in H 2 , while a second group of films was grown with a substrate bias ranging from ϩ100 to Ϫ150 V in a gas mixture of 1%N 2 -10%CH 4 -89%H 2 . The field emission performance in terms of threshold field and emission current improved considerably as a function of increasing CH 4 concentration and negative bias voltage. Ultraviolet Raman analysis showed that the field emission enhancement resulting from an increase in CH 4 concentration from 1% to 5% correlates with a decrease in the sp 3 bonding character in the diamond film. The dependence of field emission on negative bias voltage appears to be correlated with ion bombardment-induced damage in the film during growth. The scanning electron microscopy image of the film grown with Ϫ150 V bias showed: smaller surface topographic features as compared to films grown under 0 and ϩ100 V bias. The film grown with a bias of Ϫ150 V showed the lowest threshold field ͑ϳ2.0 V/m͒ corresponding to an emission current density of 12.7 A/cm 2 . J vs E 0 measurements across a length of 40 mm over the film showed a uniform threshold field ͑2.0Ϯ0.55 V/m͒. The film grown with a positive bias ͑ϩ100 V͒ showed a relatively poor field emission performance.