Enhanced large signal performance of PZT thick film actuators for active micro-optics

Ernst, D.; Bramlage, Bernhard; Gebhardt, Sylvia; Schönecker, Andreas; Pabst, Oliver; Schreiner, Hans-Jürgen

doi:10.1109/isaf.2013.6748714

Cited by 4 publications

(7 citation statements)

References 4 publications

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“…The array, Figure 23b , was poled with a 20 kV/cm DC electric field for one minute at room temperature. The residual porosity of PZT produced with this process is usually less than 10% [ 97 ]. The measured dielectric constant and loss are ε 33 T / ε 0 = 2250 ± 100 and tanδ = 0.09 ± 0.005 at 10 kHz, respectively [ 91 ].…”

Section: Resultsmentioning

confidence: 99%

Acoustic Devices for Particle and Cell Manipulation and Sensing

Qiu

Wang

Démoré

et al. 2014

Sensors

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An emerging demand for the precise manipulation of cells and particles for applications in cell biology and analytical chemistry has driven rapid development of ultrasonic manipulation technology. Compared to the other manipulation technologies, such as magnetic tweezing, dielectrophoresis and optical tweezing, ultrasonic manipulation has shown potential in a variety of applications, with its advantages of versatile, inexpensive and easy integration into microfluidic systems, maintenance of cell viability, and generation of sufficient forces to handle particles, cells and their agglomerates. This article briefly reviews current practice and reports our development of various ultrasonic standing wave manipulation devices, including simple devices integrated with high frequency (>20 MHz) ultrasonic transducers for the investigation of biological cells and complex ultrasonic transducer array systems to explore the feasibility of electronically controlled 2-D and 3-D manipulation. Piezoelectric and passive materials, fabrication techniques, characterization methods and possible applications are discussed. The behavior and performance of the devices have been investigated and predicted with computer simulations, and verified experimentally. Issues met during development are highlighted and discussed. To assist long term practical adoption, approaches to low-cost, wafer level batch-production and commercialization potential are also addressed.

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Section: Resultsmentioning

confidence: 99%

Acoustic Devices for Particle and Cell Manipulation and Sensing

Qiu

Wang

Démoré

et al. 2014

Sensors

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“…The fabricated array was poled with a 20 kV/cm DC electric field for one minute at room temperature. The residual porosity of PZT produced with this process is usually less than 10% [58]. The measured dielectric constant and the dielectric loss were e 33 T /e 0 = 2250 ± 100 and tan d = 0.09 ± 0.005 at 10 kHz, respectively.…”

Section: Array Fabricationmentioning

confidence: 95%

“…2 with the layer thicknesses and key material properties listed in Table 1. The piezoelectric material properties of PZT (IKTS-PZ5100 [51,58], Fraunhofer IKTS, Germany) are listed in Table 2, with a mechanical Q-factor of 76 at 1 MHz, and the other materials were assigned properties defined in the PZFlex material libraries. The FEA mesh size was 2.75 lm, approximately 1.38% of the wavelength in water, k w , at the 7.5 MHz frequency of interest, and the complete model was assigned a width four times the mesh size in the x-axis and with symmetry boundary conditions on both sides.…”

Section: Finite Element Analysismentioning

confidence: 99%

“…A PZT thick film paste, IKTS-PZ5100, developed at Fraunhofer IKTS was used; this is based on Sonox P51 powder (CeramTec GmbH, Germany) with the addition of a low temperature sintering eutectic mixture of Bi 2 O 3 and ZnO. The content of the eutectic mixture has a significant influence on the dielectric and electromechanical properties of the PZT thick film [58]. In the present case, about 10 wt% eutectic mixture was added to the PZT powder.…”

Section: Array Fabricationmentioning

confidence: 99%

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Screen-printed ultrasonic 2-D matrix array transducers for microparticle manipulation

et al. 2015

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This paper reports the development of a two-dimensional thick film lead zirconate titanate (PZT) ultrasonic transducer array, operating at frequency approximately 7.5MHz, to demonstrate the potential of this fabrication technique for microparticle manipulation. All layers of the array are screen-printed then sintered on an alumina substrate without any subsequent patterning processes. The thickness of the thick film PZT is 139±2μm, the element pitch of the array is 2.3mm, and the dimension of each individual PZT element is 2×2mm(2) with top electrode 1.7×1.7mm(2). The measured relative dielectric constant of the PZT is 2250±100 and the dielectric loss is 0.09±0.005 at 10kHz. Finite element analysis was used to predict the behaviour of the array and to optimise its configuration. Electrical impedance spectroscopy and laser vibrometry were used to characterise the array experimentally. The measured surface motion of a single element is on the order of tens of nanometres with a 10Vpeak continuous sinusoidal excitation. Particle manipulation experiments have been demonstrated with the array by manipulating Ø10μm polystyrene microspheres in degassed water. The simplified array fabrication process and the bulk production capability of screen-printing suggest potential for the commercialisation of multilayer planar resonant devices for ultrasonic particle manipulation.

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“…For example, with unimorph cantilevers it is very often assumed that the thickness of the cantilever is much smaller than its width and length, the electrode layers are so thin that they do not contribute to the mechanical behavior of the cantilever, the applied electric field is evenly distributed along electrode area and the layers of the cantilever do not slip relative to each other during bending. [3,4,18,[5][6][7][13][14][15][16][17] Also, the fixing of the cantilever should be taken into account, for example the unimorphs may be studied by clamping samples from the center (knife edge clamping) [3] or from one end leaving the other free, the latter being more commonly used in cantilever piezoelectrics.…”

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confidence: 99%

Enhanced piezoelectric performance of ceramic-polymer composite cantilevers with thin metal substrates

Siponkoski

Jantunen

Juuti

2022

Applied Physics Letters

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In this work the electromechanical properties of lead zirconate titanate-poly(vinylidenefluoridetrifluoroethylene) ceramic-polymer composite on thin brass and steel substrates were investigated.Samples were stencil printed on metal foils and cured at 120 °C. The effective transverse piezoelectric coefficient (d31eff) was calculated by utilizing the converse piezoelectric effect and measuring the displacement of a cantilever sample's tip in an electric field. Interestingly, the results showed improved piezoelectric properties with the stiffer steel substrate samples. The highest d31eff achieved was about -22 pm/V, which was 29 % higher than in samples printed on brass foil (-17 pm/V).Both are substantially higher compared to the coefficients reported with similar ceramic-polymer composites on polymer substrates. The improvement is suggested to originate from the prevention of buckling effects and more effective bending deformation, while the structure remained flexible.Due to the high effective values of d31 and g31, the developed material and cantilever structures are feasible for both sensor and energy harvesting applications.Cantilevers or beams are widely used designs in piezoelectric applications such as energy harvesting, sensors and actuators. They can be categorized by their structure into the following groups: unimorph, bimorph or multimorph.[1-13] The number of layers, their thickness and the Young's modulus ratios between the layers greatly affect the electromechanical behavior of the piezoelectric cantilever which also can easily be seen as a change in the cantilever's stiffness or bendability. This is especially true if the piezoelectric layer is soft polymer or ceramic-polymer composite and the passive layer is bulk ceramic with a high Young's modulus. However, to observe the changes in electromechanical behavior when combining such materials, careful measurements and calculation are required. Many research groups have developed models and equations to describe these properties in multilayer piezoelectric structures and to enable more accurate design of piezoelectric cantilevers for specific applications. Steel et al. reported the quasistatic response of piezoelectric ceramic-metal unimorphs, which they called "heterogenous bimorphs ", in 1978[3] and later in 1991 Smits and Choi developed the "constituent equations of piezoelectric heterogeneous bimorphs" [14]. Wang and Cross et al. have furthermore published many equations describing the detailed properties of both bimorph and unimorph cantilevers such as maximum displacement, electromechanical coupling and maximum generated force as a function of layer thickness and Young's modulus ratio [15][16][17][18]. They have shown, for example, that with a unimorph structure the

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Enhanced large signal performance of PZT thick film actuators for active micro-optics

Cited by 4 publications

References 4 publications

Acoustic Devices for Particle and Cell Manipulation and Sensing

Acoustic Devices for Particle and Cell Manipulation and Sensing

Screen-printed ultrasonic 2-D matrix array transducers for microparticle manipulation

Enhanced piezoelectric performance of ceramic-polymer composite cantilevers with thin metal substrates

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