Enhanced laser trimming of thin film resistors dedicated to snubber for high power IGBT modules

Watanabe, Ryosuke; Hidaka, Shigeru; Akasaka, Tomoya; Kajiya, Shota; Arima, Taisei; Kurokawa, Atsushi; Kanamoto, Toshiki

doi:10.1109/mwscas54063.2022.9859464

Cited by 1 publication

(2 citation statements)

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“…The position of the trimming end in the direction of trimming width is related to the maximum temperature of the films. A recent study reveals that the longer the trimming width is, the lower the maximum temperature is [30]. We change the trimming depth so that the trimming width becomes as large as possible.…”

Section: Proposed Thermal Aware Trimming Methodsmentioning

confidence: 99%

“…Figure 4 shows the example of destruction by the pulsed power injection. Our recent investigation indicates that the maximum temperature rise can be suppressed by locating the trimming endpoint close to the edge of the resistance body [30]. Destruction from the end of the trimming is due to high temperatures, which we can explain using an electrical equivalent circuit model [31].…”

Section: Introductionmentioning

confidence: 99%

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A thermally optimizing method of thin film resistor trimming with machine learning

Arima

Hidaka

Watanabe

et al. 2023

IEICE Electron. Express

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This paper proposes a novel trimming method of thin-film resistors dedicated to the power modules. Thin-film resistors are utilized for applications including snubber circuits which avoids unwanted ringing appearing in the output voltage of power transistors. Our previous works have revealed that the applicable voltage of a NiCr thin-film resistor is thermally limited, and then the indispensable trimming process affects the degree of temperature rise in use. In this paper, we first formulate the relationship between the target resistance value and the trim dimensions using machine learning. With the obtained equation, we propose a new trimming method, which enables the trimmed pattern to reduce the variability of the maximum temperature rise. The experimental results show that the proposed trimming method can suppress the estimated range of the maximum temperature from 619 K to 179 K.

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Section: Proposed Thermal Aware Trimming Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%