“…On-chip fabrication of resonator and waveguide coupler arrays, such as shown in figures 10 and 14, is possible using reactive ion etching of various resonator material layers grown on a substrate [156,356,357,374,385,393,455,531,594], sometimes complete with a protective layer. In the case of silicon, the resonator-waveguide structures have been fabricated using the standard silicon-on-insulator microfabrication techniques [454, 522-528, 612, 613].…”