“…Moreover, SALD can be sensitive to ambient air if performed in open air, highly volatile precursors are needed for SALD, and, The thin film deposition technique of ALD has a wide range of applications [3,5,9,10]. Some of the important applications of ALD include but are not limited to the following areas: semiconductor engineering [11][12][13], lithium-ion batteries [14][15][16], microelectromechanical systems (MEMS) [17,18], capacitors [19,20], fuel cells [21][22][23], solar cells [24][25][26], transistors [27][28][29], drug delivery [30,31], medical and biomedical fields [32][33][34][35], dental materials [6,10], and orthopedical implants [36][37][38]. Due to the capability of precisely depositing conformal ultra-thin films, ALD has found a wide range of applications in the fabrication of microelectronics such as gate oxides, semiconductors, and ferroelectrics [12,39,40].…”