2020
DOI: 10.3390/ma14010144
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Enhanced P-Type GaN Conductivity by Mg Delta Doped AlGaN/GaN Superlattice Structure

Abstract: A method of combining the AlGaN/GaN superlattices and Mg delta doping was proposed to achieve a high conductivity p-type GaN layer. The experimental results provided the evidence that the novel doping technique achieves superior p-conductivity. The Hall-effect measurement indicated that the hole concentration was increased by 2.06 times while the sheet resistivity was reduced by 48%. The fabricated green-yellow light-emitting diodes using the achieved high conductivity p-type GaN layer showed an 8- and 10-time… Show more

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Cited by 10 publications
(1 citation statement)
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“…Various methods, such as Mg-delta doping [26] and short period super lattice (SL) [27], are used to improve the activation efficiency of Mg-dopants. The injection of hole into the active region in deep-ultra-violet (DUV) LED will be of low efficiency for low conductivity of p-type Al-rich AlGaN alloy as EBL [28].…”
Section: Polarization-induced Doping and Graded Compositionmentioning
confidence: 99%
“…Various methods, such as Mg-delta doping [26] and short period super lattice (SL) [27], are used to improve the activation efficiency of Mg-dopants. The injection of hole into the active region in deep-ultra-violet (DUV) LED will be of low efficiency for low conductivity of p-type Al-rich AlGaN alloy as EBL [28].…”
Section: Polarization-induced Doping and Graded Compositionmentioning
confidence: 99%