Enhanced performance of low-dielectric siloxane-polyimide copolymers: Synthesis and properties
Jian Qiao Li,
Ming Zeng,
Xin Hao Xu
et al.
Abstract:Low-dielectric polyimides (PI) films with outstanding overall performance are attractive for next generation microelectronic applications. Herein, a series of two different FPIs and BPIs derived from 4,4′-diaminodiphenyl ether (ODA) and two different functional dianhydrides, 4,4'-(hexafluoroisopropylidene) biphthalic anhydride (6FDA) and 4,4′-(4,4′-isopropyldiphenoxy) biphthalic anhydride (BPADA), respectively, were synthesized by a conventional two-step methodology that included thermoimidatization. Additiona… Show more
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