Reactions
of Ta(NMe2)5 and n-propylamine
are shown to be an effective system for sol-gel processing of Ta3N5. Ordered macroporous films of Ta3N5 on silica substrates have been prepared by infiltration
of such a sol into close-packed sacrificial templates of cross-linked
500 nm polystyrene spheres followed by pyrolysis under ammonia to
remove the template and crystallize the Ta3N5. Templates with long-range order were produced by controlled humidity
evaporation. Pyrolysis of a sol-infiltrated template at 600 °C
removes the polystyrene but does not crystallize Ta3N5, and X-ray diffraction shows nanocrystalline TaN plus amorphous
material. Heating at 700 °C crystallizes Ta3N5 while retaining a high degree of pore ordering, whereas at
800 °C porous films with a complete loss of order are obtained.