Enhanced Resolution of Depth Profiles Using Two-dimensional XPS Data

Abstract

It is shown that the accuracy by which a concentration–depth profile can be estimated from the inelastic background of an XPS spectrum is dramatically improved by using two‐dimensional (2D) data. The energy loss distribution of the photoelectrons for several values of the detection angle, or the energy of the excitation source, are treated as a single 2D data set. The resolution of the depth profile estimated from this set is far better than can be obtained from any single XPS spectrum.