2010
DOI: 10.1063/1.3512965
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Enhanced room temperature oxidation in silicon and porous silicon under 10 keV x-ray irradiation

Abstract: We report the observation of enhanced oxidation on silicon and porous silicon samples exposed in air ambient to high-dose-rate 10 keV x-ray radiation at room temperature. The evolution of the radiation-induced oxide growth is monitored by ellipsometry and interferometric reflectance spectroscopy. Fourier transform infrared ͑FTIR͒ spectroscopy shows the emergence of Si-O-Si stretching modes and corresponding suppression of SiH x and Si-Si modes in the porous silicon samples. The radiation response depends stron… Show more

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Cited by 14 publications
(7 citation statements)
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“…In addition, nowadays, Si-based field emitters are being used as neutralizers to reduce spacecraft charging, which occurs as a side-effect during propulsion . Thus, numerous reports are available on the preparation of Si nanowires, nanobelts, nanoribbons, as well as nanotubes and their utilization in miniaturized electronic devices, which show good FE properties. , However, upon getting exposed to ambient conditions, these nanostructures are prone to getting oxidized due to the formation of a native oxide layer (dielectric) at RT, which creates an additional tunneling barrier for electrons, resulting in a drastic reduction in the FE properties. At the same time, SiO 2 is an important candidate in micro- and nanoelectronic industries and protects the Si surface from contamination-related issues as well.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, nowadays, Si-based field emitters are being used as neutralizers to reduce spacecraft charging, which occurs as a side-effect during propulsion . Thus, numerous reports are available on the preparation of Si nanowires, nanobelts, nanoribbons, as well as nanotubes and their utilization in miniaturized electronic devices, which show good FE properties. , However, upon getting exposed to ambient conditions, these nanostructures are prone to getting oxidized due to the formation of a native oxide layer (dielectric) at RT, which creates an additional tunneling barrier for electrons, resulting in a drastic reduction in the FE properties. At the same time, SiO 2 is an important candidate in micro- and nanoelectronic industries and protects the Si surface from contamination-related issues as well.…”
Section: Introductionmentioning
confidence: 99%
“…[12,15] It is unusual that the Raman spectra of these very thin Si samples remain highly stable after 2-3 years the sample were grown. One would expect that the thin Si structures had been mostly oxidized and converted into SiO 2 , given the oxidation rate of 11-13 Å in one day [32] or about 2 nm in one month [33] . This is one important indication of the anti-oxidation effect of the graphene substrate.…”
mentioning
confidence: 99%
“…There is indeed an oxide layer with thickness of 3 nm above the top a-Si layer. Based on previous investigations [13,14], the surface of the a-Si layer Figure 2b. The transmittance decreases with increasing number of layers.…”
Section: Experiments and Resultsmentioning
confidence: 99%
“…There is indeed an oxide layer with thickness of 3 nm above the top a-Si layer. Based on previous investigations [13,14], the surface of the a-Si layer in contact with air would be oxidized to form and an ultra-thin layer an oxide layer with a thickness of only 3 nm on the top. According to our calculation, the oxidation only shifts the center wavelength with only 2 nm and reduces the peak value in transmittance only 0.4%.…”
Section: Experiments and Resultsmentioning
confidence: 99%