“…with sputtering [9], pulsed laser deposition [10], electron cyclotron resonance [11], filtered cathodic vacuum arc process [12,13] and plasma enhanced chemical vapor deposition [14,15] as some more detailed examples. PVD and CVD techniques are used to produce thin and ultra-thin coatings of inorganic elements (metals, semiconductors, ceramics) as well as carbon and some organic compounds [16].…”