Abstract:Abstract-This paper investigates the temperature dependence of phonon-scattering-limited mobility µ PH for advanced shortchannel strained pMOS devices. By using the split CV method and Matthiessen's rule, surface-roughness-limited mobility µ SR and µ PH are successfully decoupled. This paper indicates that the temperature sensitivity of µ PH is proportional to T −1.75 for a neutral stressor and becomes higher when compressive strain is applied. It is explained by the higher optical phonon energy induced by uni… Show more
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