Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

Li, Wenyin; Xiao, Dingbang; Wu, Xuezhong; Su, Jianbin; Chen, Zhihua; Hou, Zhanqiang; Wang, Xinghua

doi:10.1007/s00542-016-3114-x

Cited by 19 publications

(10 citation statements)

References 17 publications

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“…Mohammadi et al (2018) stated that the large drive mode amplitude will increase the sensitivity of gyroscopes. To ensure the detection accuracy of gyroscope, it is necessary to ensure the stability of driving frequency and amplitude of vibration velocity (Li et al , 2016). Improving the drive control circuit is an effective way to improve the frequency tracking ability and amplitude stability of a MEMS gyroscope.…”

Section: Introductionmentioning

confidence: 99%

A method to improve tracking ability of drive control of MEMS gyroscopes

Chen

Zhu

Mou

et al. 2021

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Purpose A high-precision gyroscope is an important tool for accurate positioning, and the amplitude stability and frequency tracking ability of the drive control system are important and necessary conditions to ensure the precision of micro-electro-mechanical systems (MEMS) gyroscopes. To improve the precision of MEMS gyroscopes, this paper proposes a method to improve the amplitude stability and frequency tracking ability of a drive control system. Design/methodology/approach A frequency tracking loop and an amplitude control loop are proposed to improve the frequency tracking ability and amplitude stability of the drive control system for a MEMS gyroscopes. The frequency tracking loop mainly includes a phase detector, a frequency detector and a loop filter. And, the amplitude control loop mainly includes an amplitude detector, a low-pass filter and an amplitude control module. The simulation studies on the frequency tracking loop, amplitude control loop and drive control system composed of these two loops are implemented. The corresponding digital drive control algorithm is realized by the Verilog hardware description language, which is downloaded to the application-specific integrated circuits (ASIC) platform to verify the performances of the proposed method. Findings The simulation experiments in Matlab/Simulink and tests on the ASIC platform verify that the designed drive control system can keep the amplitude stable and track the driving frequency in real time with high precision. Originality/value This study shows a way to design and realize a drive control system for MEMS gyroscopes to improve their tracking ability. It is helpful for improving the precision of MEMS gyroscopes.

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Section: Introductionmentioning

confidence: 99%

A method to improve tracking ability of drive control of MEMS gyroscopes

Chen

Zhu

Mou

et al. 2021

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“…It is known that there are many factors that may hinder the angular velocity measurement such as asymmetrical structure, temperature [1][2][3][4], humidity in packing environment, and other disturbances. Great efforts have been devoted to improve system performances and robustness by suppressing parameter uncertainties and external disturbances [5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control Method for Z-Axis Vibrating Gyroscope Using Prescribed Performance Approach

Hua

Zhang

et al. 2020

Applied Sciences

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This paper investigates one kind of high performance control methods for Micro-Electro-Mechanical-System (MEMS) gyroscopes using adaptive sliding mode control (ASMC) scheme with prescribed performance. Prescribed performance control (PPC) method is combined with conventional ASMC method to provide quantitative analysis of gyroscope tracking error performances in terms of specified tracking error bound and specified error convergence rate. The new derived adaptive prescribed performance sliding mode control (APPSMC) can maintain a satisfactory control performance which guarantees system tracking error, at any time, to be within a predefined error bound and the error convergences faster than the error bound. Besides, adaptive control (AC) technique is integrated with PPC to online tune controller parameters, which will converge to their true values at last. The stability of the control system is proved in the Lyapunov stability framework and simulation results on a Z-axis MEMS gyroscope is conducted to validate the effectiveness of the proposed control approach.

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“…(3,4) Maintaining the stability of the drive mode is the key to improving accuracy. (5) In addition, the printed circuit board (PCB) of the analog circuit is susceptible to interference from external environmental factors, such as package, temperature, and humidity, which affect the measurement accuracy. On the other hand, using electronic technology to achieve drive control can reduce external environment interference and improve measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%

A Drive Control Method for Silicon Micro-gyroscopes

Zhu¹,

Chen²,

Hua³

et al. 2020

Sensors and Materials

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The tracking ability of a silicon micro-gyroscope in a highly dynamic environment is a key factor for MEMS and inertial technology. To improve the tracking ability in a highly dynamic environment, a new drive control method for silicon micro-gyroscopes is proposed. First, a double closed-loop system with a phase-locked loop (PLL) and an automatic gain control (AGC) is designed to track the resonant frequency and stabilize the output amplitude. Second, the framework and corresponding algorithm of a second-order frequency-locked loop (FLL)-assisted third-order PLL were designed. Thereafter, the tracking performance characteristics of a thirdorder PLL and the proposed second-order-FLL-assisted third-order PLL at different frequency differences were simulated in Matlab Simulink. Simulation results show that the second-order-FLL-assisted third-order PLL can track the resonant frequency in a shorter time with a higher precision than the third-order PLL, and that the proposed method can still lock the resonant frequency of 11570 Hz when the frequency difference increases to 400 Hz, demonstrating its applicability in highly dynamic environments. Finally, the digital application specific integrated circuit (ASIC) test platform further validates the effectiveness of our proposed drive control method.

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Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

Cited by 19 publications

References 17 publications

A method to improve tracking ability of drive control of MEMS gyroscopes

A method to improve tracking ability of drive control of MEMS gyroscopes

Adaptive Sliding Mode Control Method for Z-Axis Vibrating Gyroscope Using Prescribed Performance Approach

A Drive Control Method for Silicon Micro-gyroscopes

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