“…Y 2 O 3 films have been deposited and characterized using many techniques for different purposes [15,16]. Zhang et al [17] found that the hardness of ZnS coated with Y 2 O 3 and SiO 2 multilayer increased from 250 to 430 kg/mm 2 and the transmittance increased from 63% to 83% at 3-5 lm. Rivera et al [18] researched Eu:Y 2 O 3 films on Si(1 0 0)/Si(1 1 1) substrates showing that they can improve the red emission by annealing the films in an oxygen atmosphere.…”