Enhancement in the Light Output Power of GaN-Based Light-Emitting Diodes with Nanotextured Indium Tin Oxide Layer Using Self-Assembled Cesium Chloride Nanospheres

Zhang, Yiyun; Li, Jing; Wei, Tongbo; Liu, Jing; Yi, Xiaoyan; Fu, Yi

doi:10.1143/jjap.51.020204

Cited by 2 publications

(1 citation statement)

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“…Moreover, the total internal reflection occurring at the interface between the GaN ( n = 2.5), the smooth ITO ( n = 2.08), and the ambient air ( n = 1) limits the light extraction efficiency. It was previously demonstrated that the light extraction efficiency of LEDs can be improved by intentionally roughening LED surface . A similar concept has also been applied to LED chip sidewalls, and more photons might escape from LEDs with textured sidewalls as compared to LEDs with flat sidewalls .…”

Section: Introductionmentioning

confidence: 99%

Highly efficient and reliable high power InGaN/GaN LEDs with 3D patterned step‐like ITO and wavy sidewalls

Zheng

Zhou

et al. 2015

Physica Status Solidi (a)

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Nitride‐based high power LEDs with finger‐like SiO2 current blocking layer (CBL), three‐dimensional (3D) patterned step‐like ITO double layers and wavy sidewalls were fabricated. The finger‐like SiO2 CBL beneath finger‐like p‐electrode was designed to prevent current crowding effect, thereby facilitating uniform current spreading over the entire chip. In addition, 3D patterned step‐like ITO double layers, including alternating 230 nm thick patterned upper step ITO layer and 100 nm thick lower step ITO layer, were formed by combining photolithography and aqua regia etchant. We showed that the top light extraction efficiency of high power LEDs can be significantly enhanced by taking 3D patterned step‐like ITO. The light output power of high power LEDs with 3D patterned step‐like ITO double layers is 13.9% higher than that of LEDs with smooth ITO layer. High‐power LEDs with wavy sidewalls was fabricated by an optimized mask design in conjunction with dry etching process based on Cl2/BCl3 to improve light extraction efficiency at the horizontal direction. We demonstrated that light output power of high power LEDs with wavy sidewalls can be improved by 11% as compared to LEDs with flat sidewalls.

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Section: Introductionmentioning

confidence: 99%