Abstract:The upper limit of sensitivity enhancement in a multipass process was investigated. In the calculation of 3.7×1013 ray-trace analysis, the sensitivity enhancement was increased to 13,510 for the mirror diameter of 75 mm with the mirror diameter. In the experiment, the sensitivity was enhanced by a factor of 1790 ± 160 for an effective mirror diameter of 50 mm, which was one-third of the numerical prediction. The lower enhancement could be attributed to the insufficient spatial and angular resolution of alignme… Show more
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