1991
DOI: 10.1109/55.75748
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Enhancement-mode quantum-well Ge/sub x/Si/sub 1-x /PMOS

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Cited by 191 publications
(31 citation statements)
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“…Si 1−x Ge x is also promising for quantum well devices, infrared detectors, and modulation-doped field-effect transistors [2]. In this work, we present an extended full-potential calculation method for calculating electronic and optical properties of Si 1−x Ge x .…”
Section: Introductionmentioning
confidence: 99%
“…Si 1−x Ge x is also promising for quantum well devices, infrared detectors, and modulation-doped field-effect transistors [2]. In this work, we present an extended full-potential calculation method for calculating electronic and optical properties of Si 1−x Ge x .…”
Section: Introductionmentioning
confidence: 99%
“…This results in improved p-channel devices for complementary metal-oxide-semiconductor ͑CMOS͒ device integration for high frequency applications. [1][2][3] Initial thrust in SiGe based CMOS design involved work with direct wet oxide growth on a SiGe layer, which led to Ge segregation at the SiO 2 /SiGe interface. 4 -7 These studies involved thick SiGe and oxide layers; 6,8,9 for sub 0.1 m generation devices with ultrashort channels much smaller dimension are of significance.…”
Section: Introductionmentioning
confidence: 99%
“…A physical Si layer between the gate oxide and the SiGe channel limits the effect of the hot carriers and surface scattering and reduces the gate leakage current. 1 A negative consequence of the Si cap is that for high bias voltage operation a secondary Si/SiO 2 surface parasitic channel develops in parallel with the SiGe channel. 19,20 The emergence of the parasitic channel has fatal consequences on the effective mobility.…”
Section: Introductionmentioning
confidence: 99%
“…Several researchers have worked on developing Si 1Àx -Ge x -channel PMOSFETs [7][8][9][10][11]. However, all of them use undoped or n-type doped channels with p + -polysilicon gates, making them conventional surface channel PMOSFETs.…”
Section: Introductionmentioning
confidence: 99%