Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

Sun, Jing-Yu; Gao, Fei; Zhou, Fang-Jie; Schulze, Julian; Wang, You-Nian

doi:10.1103/physrevlett.133.235302

Phys. Rev. Lett.

2024

DOI: 10.1103/physrevlett.133.235302

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Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

Jing-Yu Sun,

Fei Gao,

Fang-Jie Zhou

et al.

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Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

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References 38 publications

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