Integration
of high-sensitivity sensors with multiple sensing performance
for the environmental detection of permittivity (ε
r
), conductivity (σ), and the refractive index
(n) is required to support Societies 5.0. However,
there are still many sensors with low sensitivity that stand alone.
A shear-horizontal surface acoustic wave (SH-SAW) sensor is usually
used because of its high-sensitivity performance in detecting electrical
properties. Moreover, localized surface plasmon resonance (LSPR) sensors
show remarkable optical side capability. Here, we have successfully
combined these advantages with an additional benefit of sensitivity
enhancement. We propose a hybrid acoustoplasmonic sensor generated
by integrating SH-SAW and LSPR devices to simultaneously detect ε
r
, σ, and n. The SH-SAW
sensor was fabricated on a 36XY-LiTaO3 substrate using
a developed interdigital transducer. Then, the LSPR sensor was implemented
by the deposition of gold nanoparticles (AuNPs) on the propagation
surfaces of the SH-SAW sensor. Fascinatingly, the AuNPs not only generate
the LSPR effect but also enhance the SH-SAW sensor sensitivity. Comprehensive
investigations were performed with atomic force microscopy imaging,
CST software used for plasmonic E-field simulation, and hybrid sensing
evaluation. Moreover, the SH-SAW sensitivity enhancement achieved
using AuNPs was verified by frequency-domain and time-domain measurements.
Thus, the SH-SAW sensor with AuNPs has a wide ε
r
detection range (25–85), sensing capabilities
for ultrasmall σ (0.00528–0.02504 S/m), and high sensitivity
for n detection (45.5–201.9 nm/RIU). The cross-sectional
effects were also evaluated. The effect of the LSPR device on the
SH-SAW device was examined by turning the light OFF or ON (hereafter
OFF/ON). The impact of the SH-SAW device on the LSPR device was investigated
by turning the sine signal OFF/ON. We found that the SH-SAW sensor
was not impacted by light. Interestingly, the presence of the SH-SAW
sensor affects the positions of the AuNPs, which consistently generates
a small blueshift in the LSPR effect. However, insignificant variation
was noted in independent performances. In general, the SH-SAW sensor
with AuNPs shows multifunctional independent characteristics and high-sensitivity
performance, making it suitable for a chemical environment, with the
possibility of integration with a wireless network.