Here we report the eect of the irradiation by 167 MeV Xe 26+ ions (in the uence range up to 3×10 12 ions/cm 2 ) on the undoped and Cd-doped (0.4, 0.5 at.%) ZnO lms deposited by radiofrequency magnetron sputtering.As-grown and irradiated samples were investigated by cathodoluminescence spectroscopy. It was found that the radiation causes a decrease in intensity of luminescent peaks and a redistribution of the radiative recombination channels. We revealed that the cadmium incorporation into ZnO lattice enhances the radiation resistance of ZnO lm.