“…To date, a crystalline oxide semiconductor β-Ga 2 O 3 has been attracting much attention from researchers, due to its promising semiconducting properties: temperature stability, large energy band gap-induced optical transparencies, high breakdown electric ( E )-field, and minimum leakage current. − Gallium trioxide is essentially known to have five different polymorphs, α, β, γ, δ, and ε. − Among such polymorphs, monoclinic β-Ga 2 O 3 is the most stable form, and therefore, both the bulk single crystal and epitaxial thin film growths of β-Ga 2 O 3 have been carried out. High temperature and power transistors using β-Ga 2 O 3 as active channel have followed in report. − Although thin β-Ga 2 O 3 is obtained from epitaxial growth on a sapphire substrate, it could also be achieved via mechanical exfoliation after bulk crystal growth because monoclinic 3D β-Ga 2 O 3 has a large interplanar distance in (100)-orientation for weak bond-induced cleavage ([100] = 1.220 nm, [010] = 0.304 nm, [001] = 0.580 nm, β = 103.83°). ,,,,, In fact, a β-Ga 2 O 3 film with thickness less than 100 nm is hardly found by exfoliation, due to its three-dimensional (3D) nature.…”