Physical vapor deposition method was employed to deposit antimony telluride (Sb 2 Te 3) crystals in a dual-zone furnace. The microstructure, surface topography and composition of samples were characterized using X-ray diffraction, atomic force and scanning electron microscopy. Seebeck coefficient (S\c), electrical conductivity (r\c) as well as power factor (PF) were enhanced for pure Sb 2 Te 3 samples upon annealing, and the samples annealed at 473 K exhibited the highest PF of 3.16 9 10-3 W m-1 K-2 with an enhancement of 22% in the figure of merit (Z). When the delivered dose of 60 Co gamma radiation was increased from 0 to 30 kGy in the stoichiometric crystals, r\c decreased due to the decrease in mobility. As a result of the increase in S, PF and Z improved by 12.11 and 13.7%, respectively, in the 30 kGy gammairradiated crystals. Both R H (B||c) and S\c were positive, suggesting that the prepared Sb 2 Te 3 crystals retained the p-type semiconductivity after these treatments.