Enhancing mixing efficiency in microscale processes for sensitive biomedical, pharmaceutical, and chemical applications is crucial, particularly when operating under low-velocity constraints. This study presents a comprehensive investigation into the impact of various factors on microfluidic mixing within a circular mixing chamber micromixer, utilizing electroosmotic principles. The governing equations are solved numerically using the finite element technique-based solver. This research examines the effects of microchamber diameter (D), inlet velocity (uo), alternating current (AC) voltage amplitude (ϕo), and AC frequency (f) on fluid mixing dynamics. Several key findings are noted from this study. The reduction of the circular microchamber diameter decreases the linear distance between cross-reciprocally placed microelectrodes, resulting in increased electroosmosis force and mixing efficiency. The voltage amplitude within the specified range shows increased mixing efficiency when fluid species are combined at appropriate velocity and AC frequency. The highest mixing efficiency of 98.84% is achieved with the following parameters: flow velocity (uo) of 150 μm/s, AC frequency of 4 Hz, voltage amplitude of 500 mV, and microchamber diameter of 20 μm. At a frequency of 12 Hz and voltage amplitude of 500 mV, the mixing efficiency exceeds 94.66% across a wide range of input velocities (100–200 μm/s), enabling versatile control in microfluidic devices. The nonlinear interaction between electroosmotic flow and microchamber geometry significantly contributes to this enhanced mixing efficiency. These results demonstrate the potential for optimizing microfluidic mixing processes through careful parameter tuning, particularly in applications requiring high efficiency at low flow rates. Thus, this study provides valuable insights for designing more effective microfluidic systems in various scientific and industrial fields.