Microwave processing, as a new method for sintering ceramics, has key advantages such as increased heating rate, uniform heating and reduced cost compared to conventional methods. It is generally accepted that microwave sintering can improve the macroscopic mechanical performances of ceramics, however, the performances of microwave sintered ceramics on the microscopic scale are rarely investigated. In the 2 present study, the ceramics are sintered by hybrid microwave sintering (HMS), which combines the characteristics of microwave heating and conventional heating. To evaluate the homogeneous performance of the sintered ceramics, the behaviors of thermal residual stress distribution in the microwave sintered and conventionally sintered ceramics were investigated by X-ray diffraction technique. The thermal residual stress investigation shows microwaves can sinter an ceramics in entire volume while offering improved mechanical properties. Subsequently, the distribution behaviors of pore ratio and hardness in the ceramics were investigated respectively. The experiment results confirm that the sinterability of ceramics is homogenously improved by hybrid microwave sintering.