2023
DOI: 10.1002/smtd.202300933
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Enhancing Performance of Ultraviolet C Photodetectors Through Single‐Domain Epitaxy of Monoclinic β‐Ga2O3 Films and Tailored Anti‐Reflection Coating

Byungsoo Kim,
Seungju Kim,
Tae Hyung Lee
et al.

Abstract: Implementing high‐performance ultraviolet C photodetectors (UVC PDs) based on β‐Ga2O3 films is challenging owing to the anisotropic crystal symmetry between the epitaxial films and substrates. In this study, highly enhanced state‐of‐the‐art photoelectrical performance is achieved using single‐domain epitaxy of monoclinic β‐Ga2O3 films on a hexagonal sapphire substrate. Unlike 3D β‐Ga2O3 films with twin domains, 2D β‐Ga2O3 films exhibit a single domain with a smooth surface and low concentration of point defect… Show more

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