Microscope projection photolithography
(MPP) offers a
versatile
method of prototyping microscale devices. The benefits of MPP include
the ability to create features at a variety of dimensions, the ability
to work outside of a clean room, and the ability to use robotic microscope
stage controls to adjust the positions of features easily and accurately.
This makes MPP a precise, yet flexible technique ideal for manufacturing
contact pads that can be used to investigate the properties of individual
nanowires. An enormous breadth of research has been dedicated to the
synthesis and characterization of nanowires. The properties of individual
nanowires can, however, vary greatly between syntheses or within a
batch. Characterization of individual nanowires remains an important
step in the scale-up of these materials. Their characterization does,
however, often require complex and highly sensitive self-assembly
techniques to arrange nanowires on substrates with proper placement
of electrical contacts. Some work has been done on techniques for
the selective characterization of individual nanowires, but those
methods rely on using focused electron-beam writing techniques to
connect nanowires to pre-existing electrical contacts. The study of
nanowires would benefit from a rapid, flexible approach to fabricating
contacts for individual nanowires. This study demonstrates a system
for fabricating electrical contacts with minimum feature sizes of
∼0.9 μm on individual nanowires (e.g., diameters from
<75 to >125 nm) that are positioned randomly on a small substrate
(e.g., <1 cm2). Designs for double and quadruple contact
pads have been shown to enable the effective measurement of the electrical
properties of individual nanowires. The techniques provided herein
can provide a rapid, simple, and customizable method of studying individual
nanowires.