Environment friendly chemical mechanical polishing of copper

Zhang, Zhenyu; Cui, Junfeng; Zhang, Jiabo; Liu, Dongdong; Yu, Zhenxin; Guo, Dongming

doi:10.1016/j.apsusc.2018.10.133

Cited by 250 publications

(56 citation statements)

References 45 publications

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“…In recent years, sustainable development has become a typically discussed theme worldwide and has increasingly attracted people's attention toward protecting the environment and energy saving, resulting in numerous advanced techniques being exploited. For example, novel environmentally friendly slurries have been developed and used widely in the semiconductor, microelectronics, and optoelectronics industries, consequently reducing pollution induced by traditional manufacturing and industries significantly [1][2][3][4]. Recently, nontoxic and eco-friendly carbon-based materials including fullerene, carbon nanotubes, graphene, onion-like carbon, nano-graphite, and nanodiamond have become research hotspots in material and chemical sciences.…”

Section: Introductionmentioning

confidence: 99%

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tang

Zhu

2021

Friction

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Advances in nano-lubricant additives are vital to the pursuit of energy efficiency and sustainable development. Carbon dots (CDs) have been widely investigated in the domain of lubricant additives owing to their extraordinary tribological properties, in particular, their friction-reducing and anti-wear properties. Metal-doped CDs are a new type of CDs, and their friction-reducing and anti-wear properties are attracting increasing attention. Therefore, a series of CDs doped with various divalent metal ions have been successfully synthesized via one-pot pyrolysis. The tribological properties of the synthesized CDs as water-based lubricant additives are in the following order: Zn-CDs > Cu-CDs ≫ Mg-CDs > Fe-CDs > U-CDs. Specifically, adding 1.0 wt% of Zn-CDs into water-based lubricant results in 62.5% friction and 81.8% wear reduction. Meanwhile, the load-carrying capacity of the water-based lubricant increases from 120 N to at least 500 N. Zn-CDs as an additive have long service life. Additionally, anion-tuned Zn-CDs fabricated via anion exchange exhibit promise as lubricant additives for poly(ethylene glycol). Based on the results of wear scar surface analyses, it is discovered that tribochemical films, primarily composed of iron oxides, nitrides, metal carbonates, zinc oxides, zinc carbonates, organic compounds, and embedded carbon cores, formed on the rubbing surfaces with a thickness of approximately 270 nm when Zn-CDs are used as additives. This film combined with the “ball-bearing” and third-particle effects of Zn-CDs contributed to excellent lubrication performance.

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Section: Introductionmentioning

confidence: 99%

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tang

Zhu

2021

Friction

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“…However, the polishing effect of optimizing experimental parameters in the CMP process is limited [10][11][12][13]. Therefore, the development of a novel polishing slurry is desirable for improving the accuracy and efficiency of CMP [14][15][16][17][18][19]. As one of these components, abrasives are critical for removing the corrosion layer by mechanical grinding in a typical CMP process.…”

Section: Introductionmentioning

confidence: 99%

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

et al. 2021

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The chemical mechanical polishing (CMP) technology has been widely used for surface modification of critical materials and components with high quality and efficiency. In a typical CMP process, the mechanical properties of abrasives play a vital role in obtaining the ultra-precision and damage-free surface of wafers for improvement of their performances. In this work, a series of fine structured rod-shaped silica (RmSiO 2 )-based abrasives with controllable sizes and diverse ordered mesoporous structures were synthesized via a soft template approach, and successfully applied in the sustainable polishing slurry for improving the surface quality of cadmium zinc telluride (CZT) wafers. Compared with commercial silica gel, solid and mesoporous silica spheres, the RmSiO 2 abrasives present superior elastic deformation capacity and surface precision machinability on account of their mesoporous structures and rod shapes. Especially, ultra-precision surface roughness and relatively effective material removal speed were achieved by the CMP process using the RmSiO 2 abrasives with a length/diameter (L/d) ratio of 1. In addition, a potential CMP mechanism of the developed polishing slurry to CZT wafer was elucidated by analyzing X-ray photoelectron spectra and other characterizations. The proposed interfacial chemical and mechanical effects will provide a new strategy for improving abrasives' machinability and precision manufacture of hard-to-machine materials.

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“…As an example, nanomaterials can be used to protect the environment during conventional machining and manufacturing processes that generate pollution due to the use of toxic and corrosive slurries. This is undertaken by employing nanomaterials to develop novel environmental-friendly chemical and mechanical polishing slurries (Zhang et al 2012a(Zhang et al , b, 2013(Zhang et al , 2015a(Zhang et al , b, 2018(Zhang et al , 2019(Zhang et al , 2020aWang et al 2018). The use of improved procedures and enhanced slurries enables the fabrication of high-performance devices in semiconductor and microelectronics industries (Zhang et al 2017a;Qumar et al 2020;Raza et al 2019;Ikram et al 2020b).…”

Section: Introductionmentioning

confidence: 99%

Bactericidal behavior of chemically exfoliated boron nitride nanosheets doped with zirconium

et al. 2020

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In this work, boron nitride nanosheets (BNNS) were produced through chemical exfoliation of bulk boron nitride (BN). Furthermore, hydrothermal technique was used to incorporate various concentrations (2.5, 5, 7.5, and 10 wt%) of zirconium (Zr) as a dopant. The prepared undoped and doped BN samples were evaluated for its antimicrobial activity against E. coli and S. aureus. Structural analysis was undertaken using x-ray diffraction which identified the presence of hexagonal BN. FTIR and Raman spectroscopy were utilized to outline IR fingerprint and electronic properties of the synthesized material. Morphological information was obtained through micrographs extracted using field emission scanning electron spectroscope (FESEM) and high resolution transmission electron microscope (HRTEM), while d-spacing was also calculated through HRTEM analysis. Optical properties and emission spectra were examined by applying UV-vis and photoluminescence spectroscope (PL); whereas, band gap analysis was carried out via Tauc plot. Zr-doped BN nanosheets at increasing concentrations (0.5, 1.0 mg/50 μl) revealed enhanced antibacterial activity against E. coli compared to S. aureus (p < 0.05).

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Environment friendly chemical mechanical polishing of copper

Cited by 250 publications

References 45 publications

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Bactericidal behavior of chemically exfoliated boron nitride nanosheets doped with zirconium

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