A “phase transition” model is presented, which treats quantitatively the experimental results obtained on erbium‐doped oxidized amorphous silicon. The model is based on the assumption that on the change of molar concentration of oxygen in the gaseous plasma during the preparation of erbium‐doped amorphous silicon at special oxygen concentrations supramolecular erbium–oxygen complexes (“clusters') are formed in the plasma, which are eventually deposited as separate species on the substrate. The threshold formation of such clusters is evidenced in the concentration of oxygen, oxygen–silicon bonds, silicon, and erbium in the erbium‐doped oxidized amorphous silicon film. Erbium photoluminescence is strongly enhanced due to the formation of large erbium–oxygen clusters, which can be regarded as erbium containing nanodielectric particles inserted in the semiconductor matrix and reveal advantages characteristic of erbium‐doped silicon dioxide with silicon nanocrystals. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)